Thermo-catalytic deposition of silicon nitride - a new method for excellent silicon surface passivation

2003 ◽  
Author(s):  
J.D. Moschner ◽  
J. Schmidt ◽  
R. Hezel
Keyword(s):  
Silicon Nitride ◽  
Silicon Surface ◽  
Surface Passivation ◽  
New Method ◽  
Silicon Surface Passivation

scholarly journals Improved Silicon Surface Passivation of APCVD Al2O3 by Rapid Thermal Annealing

2016 ◽  
Vol 92 ◽  
pp. 317-325 ◽  
Author(s):  
Lachlan E. Black ◽  
Thomas Allen ◽  
Keith R. McIntosh ◽  
Andres Cuévas
Keyword(s):  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Silicon Surface ◽  
Surface Passivation ◽  
Silicon Surface Passivation

Silicon surface passivation using thin HfO2 films by atomic layer deposition

2015 ◽  
Vol 357 ◽  
pp. 635-642 ◽  
Author(s):  
Jhuma Gope ◽  
Vandana ◽  
Neha Batra ◽  
Jagannath Panigrahi ◽  
Rajbir Singh ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Silicon Surface ◽  
Surface Passivation ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Silicon Surface Passivation
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