Optical Observation of Gas Jet Z-pinch Discharge Produced Extreme Ultraviolet Light Source

2007 ◽  
Author(s):  
Masato Watanabe ◽  
Nozomu Kishi ◽  
Naoya Iizuka ◽  
Tetsuya Orishimo ◽  
Jiang Fei ◽  
...  
Keyword(s):  
Light Source ◽  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Optical Observation ◽  
Gas Jet ◽  
Extreme Ultraviolet Light ◽  
Z Pinch

Ion debris characterization from a z-pinch extreme ultraviolet light source

2006 ◽  
Vol 99 (6) ◽  
pp. 063301 ◽  
Author(s):  
Erik L. Antonsen ◽  
Keith C. Thompson ◽  
Matthew R. Hendricks ◽  
Darren A. Alman ◽  
Brian E. Jurczyk ◽  
...  
Keyword(s):  
Light Source ◽  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Light ◽  
Z Pinch

High-radiance extreme-ultraviolet light source for actinic inspection and metrology

2012 ◽  
Vol 11 (2) ◽  
pp. 021107-1 ◽  
Author(s):  
Peter Choi ◽  
Sergey V. Zakharov ◽  
Raul Aliaga-Rossel ◽  
Aldrice Bakouboula ◽  
Otman Benali ◽  
...  
Keyword(s):  
Light Source ◽  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Light

Absorption of extreme ultraviolet light in a laser produced gas-jet plasma source

2001 ◽  
Vol 90 (8) ◽  
pp. 3726-3734 ◽  
Author(s):  
Michael Kanouff ◽  
Harry Shields ◽  
Luis Bernardez ◽  
Donald Chenoweth ◽  
Glenn Kubiak
Keyword(s):  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Plasma Source ◽  
Gas Jet ◽  
Jet Plasma ◽  
Extreme Ultraviolet Light
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