Ion debris characterization from a z-pinch extreme ultraviolet light source

Erik L. Antonsen; Keith C. Thompson; Matthew R. Hendricks; Darren A. Alman; Brian E. Jurczyk; D. N. Ruzic

doi:10.1063/1.2175471

Ion debris characterization from a z-pinch extreme ultraviolet light source

Journal of Applied Physics ◽

10.1063/1.2175471 ◽

2006 ◽

Vol 99 (6) ◽

pp. 063301 ◽

Cited By ~ 20

Author(s):

Erik L. Antonsen ◽

Keith C. Thompson ◽

Matthew R. Hendricks ◽

Darren A. Alman ◽

Brian E. Jurczyk ◽

...

Keyword(s):

Light Source ◽

Ultraviolet Light ◽

Extreme Ultraviolet ◽

Extreme Ultraviolet Light ◽

Z Pinch

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Optical observation of gas jet z-pinch discharge produced extreme ultraviolet light source

2007 IEEE Pulsed Power Plasma Science Conference ◽

10.1109/ppps.2007.4652513 ◽

2007 ◽

Author(s):

M. Watanabe ◽

N. Kishi ◽

N. Iizuka ◽

T. Orishimo ◽

J. Fei ◽

...

Keyword(s):

Light Source ◽

Ultraviolet Light ◽

Extreme Ultraviolet ◽

Optical Observation ◽

Gas Jet ◽

Extreme Ultraviolet Light ◽

Z Pinch

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Optical Observation of Gas Jet Z-pinch Discharge Produced Extreme Ultraviolet Light Source

2007 IEEE 34th International Conference on Plasma Science (ICOPS) ◽

10.1109/ppps.2007.4346271 ◽

2007 ◽

Author(s):

Masato Watanabe ◽

Nozomu Kishi ◽

Naoya Iizuka ◽

Tetsuya Orishimo ◽

Jiang Fei ◽

...

Keyword(s):

Light Source ◽

Ultraviolet Light ◽

Extreme Ultraviolet ◽

Optical Observation ◽

Gas Jet ◽

Extreme Ultraviolet Light ◽

Z Pinch

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Research of capillary Z pinch extreme-ultraviolet light source

The 31st IEEE International Conference on Plasma Science, 2004. ICOPS 2004. IEEE Conference Record - Abstracts. ◽

10.1109/plasma.2004.1339689 ◽

2004 ◽

Author(s):

Inho Song ◽

M. Okamoto ◽

K. Kitade ◽

M. Masnavi ◽

Y. Hayashi ◽

...

Keyword(s):

Light Source ◽

Ultraviolet Light ◽

Extreme Ultraviolet ◽

Extreme Ultraviolet Light ◽

Z Pinch

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Radiative Properties and Hydrodynamics of Laser Produced Tin Plasma for Efficient Extreme Ultraviolet Light Source

Springer Proceedings in Physics - X-Ray Lasers 2006 ◽

10.1007/978-1-4020-6018-2_77 ◽

2008 ◽

pp. 607-618

Author(s):

S. Fujioka ◽

H. Nishimura ◽

K. Nishihara ◽

Y. Tao ◽

T. Aota ◽

...

Keyword(s):

Light Source ◽

Ultraviolet Light ◽

Extreme Ultraviolet ◽

Radiative Properties ◽

Tin Plasma ◽

Extreme Ultraviolet Light

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Intra-cavity extreme ultraviolet light source based on a mode locked Ti:Sapphire oscillator with 9.4 MHz repetition rate

2013 Conference on Lasers & Electro-Optics Europe & International Quantum Electronics Conference CLEO EUROPE/IQEC ◽

10.1109/cleoe-iqec.2013.6801073 ◽

2013 ◽

Author(s):

E. Seres ◽

J. Seres ◽

Ch. Spielmann

Keyword(s):

Light Source ◽

Ultraviolet Light ◽

Repetition Rate ◽

Extreme Ultraviolet ◽

Extreme Ultraviolet Light

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High-radiance extreme-ultraviolet light source for actinic inspection and metrology

Journal of Micro/Nanolithography MEMS and MOEMS ◽

10.1117/1.jmm.11.2.021107 ◽

2012 ◽

Vol 11 (2) ◽

pp. 021107-1 ◽

Cited By ~ 6

Author(s):

Peter Choi ◽

Sergey V. Zakharov ◽

Raul Aliaga-Rossel ◽

Aldrice Bakouboula ◽

Otman Benali ◽

...

Keyword(s):

Light Source ◽

Ultraviolet Light ◽

Extreme Ultraviolet ◽

Extreme Ultraviolet Light

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Extreme ultraviolet light production from a ZaP flow z-pinch xenon plasma

Journal of Micro/Nanolithography MEMS and MOEMS ◽

10.1117/1.2898515 ◽

2008 ◽

Vol 7 (1) ◽

pp. 013003 ◽

Cited By ~ 3

Author(s):

Keith A. Munson

Keyword(s):

Ultraviolet Light ◽

Extreme Ultraviolet ◽

Light Production ◽

Extreme Ultraviolet Light ◽

Z Pinch

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Influence of the electrode wear on the EUV generation of a discharge based extreme ultraviolet light source

Journal of Physics D Applied Physics ◽

10.1088/1361-6463/aa7c9f ◽

2017 ◽

Vol 50 (34) ◽

pp. 345601 ◽

Cited By ~ 7

Author(s):

Jochen Vieker ◽

Klaus Bergmann

Keyword(s):

Light Source ◽

Ultraviolet Light ◽

Extreme Ultraviolet ◽

Electrode Wear ◽

Extreme Ultraviolet Light

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Extreme Ultraviolet Light Source by High-Harmonic Generation Inside an Ultrafast Thin-Disk Laser

Advanced Photonics 2018 (BGPP, IPR, NP, NOMA, Sensors, Networks, SPPCom, SOF) ◽

10.1364/np.2018.npth1c.8 ◽

2018 ◽

Author(s):

F. Labaye ◽

M. Gaponenko ◽

V. J. Wittwer ◽

A. Diebold ◽

C. Paradis ◽

...

Keyword(s):

Light Source ◽

Ultraviolet Light ◽

Harmonic Generation ◽

Extreme Ultraviolet ◽

High Harmonic ◽

High Harmonic Generation ◽

Thin Disk ◽

Disk Laser ◽

Thin Disk Laser ◽

Extreme Ultraviolet Light

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Low density targets for laser-produced-plasma (LPP) extreme ultraviolet light source with high-CE and toward high-repletion supply

10.1117/12.773275 ◽

2008 ◽

Author(s):

Keiji Nagai ◽

Liqin Ge ◽

Pejun Cai ◽

Cao Pan ◽

ZhongZe Gu ◽

...

Keyword(s):

Light Source ◽

Ultraviolet Light ◽

Extreme Ultraviolet ◽

Low Density ◽

Laser Produced Plasma ◽

Extreme Ultraviolet Light

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