Absorption of extreme ultraviolet light in a laser produced gas-jet plasma source

2001 ◽  
Vol 90 (8) ◽  
pp. 3726-3734 ◽  
Author(s):  
Michael Kanouff ◽  
Harry Shields ◽  
Luis Bernardez ◽  
Donald Chenoweth ◽  
Glenn Kubiak
2017 ◽  
Vol 11 (4) ◽  
pp. 209-210
Author(s):  
Taro Sekikawa ◽  
Kenichi L. Ishikawa

2012 ◽  
Vol 19 (6) ◽  
pp. 063302 ◽  
Author(s):  
Takuya Ozawa ◽  
Shuhei Yamamura ◽  
Nao Tatsumura ◽  
Kazuhiko Horioka ◽  
Tohru Kawamura

Author(s):  
Yun Yuan ◽  
Yan-Yun Ma ◽  
Wenpeng Wang ◽  
Shijia Chen ◽  
Ye Cui ◽  
...  

Abstract In this study, we use the FLASH radiation hydrodynamic code and the FLYCHK atomic code to investigate the energy conversion and spectra associated with laser–Sn target interactions with 1 µm and 2 µm wavelength lasers. We found that the conversion efficiency (CE) reached as much as 3.38% with the 2 µm laser, which is 1.48 percentage points higher than the 1 µm laser (CE = 1.9%). In addition, we analyzed the contribution of dominant ionization states to the emission spectrum for both lasers. We observed that the growths of the out-of-band emission eventually led to a broadening of the spectrum, resulting in a reduction of SP for the 1 µm laser. By contrast, the emission main peaks were all centered near 13.5nm for the 2 µm laser, which is beneficial for efficient emission of light with a 13.5 nm wavelength (relevant for nanolithographic applications).


2018 ◽  
Vol 113 (15) ◽  
pp. 153502 ◽  
Author(s):  
A. G. Shalashov ◽  
A. V. Vodopyanov ◽  
I. S. Abramov ◽  
A. V. Sidorov ◽  
E. D. Gospodchikov ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document