Inductively coupled plasma etching of (Pb,Sr)TiO/sub 3/ thin film in a Cl/sub 2//Ar plasma

2003 ◽  
Author(s):  
G.H. Kim ◽  
D.P. Kim ◽  
K.T. Kim ◽  
C.I. Kim
Keyword(s):  
Thin Film ◽  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled ◽  
Ar Plasma

Inductively coupled plasma etching of bulk 6H-SiC and thin-film SiCN in NF3 chemistries

1998 ◽  
Vol 16 (4) ◽  
pp. 2204-2209 ◽  
Author(s):  
J. J. Wang ◽  
E. S. Lambers ◽  
S. J. Pearton ◽  
M. Ostling ◽  
C.-M. Zetterling ◽  
...  
Keyword(s):  
Thin Film ◽  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled

Inductively coupled plasma etching for delineation of InAs/GaSb pixels

2012 ◽  
Author(s):  
Jean Nguyen ◽  
John Gill ◽  
Sir B. Rafol ◽  
Alexander Soibel ◽  
Arezou Khoshakhlagh ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled

Inductively coupled plasma etching of HgCdTe using a CH4-based mixture

2005 ◽  
Vol 34 (6) ◽  
pp. 740-745 ◽  
Author(s):  
E. Laffosse ◽  
J. Baylet ◽  
J. P. Chamonal ◽  
G. Destefanis ◽  
G. Cartry ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled
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