Development and characterization of electromagnetic micro shutter in MEMS variable optical attenuator
Keyword(s):
2006 ◽
Vol 15
(5)
◽
pp. 1190-1200
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2015 ◽
Vol 21
(4)
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pp. 253-261
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2013 ◽
Vol 22
(5)
◽
pp. 1229-1241
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Keyword(s):
1974 ◽
Vol 32
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pp. 254-255
1983 ◽
Vol 41
◽
pp. 270-271
1973 ◽
Vol 31
◽
pp. 144-145
1973 ◽
Vol 31
◽
pp. 132-133
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1983 ◽
Vol 41
◽
pp. 194-195
Keyword(s):
1983 ◽
Vol 41
◽
pp. 160-161