Polymer Micro-and Nano-scale Fabrication Technology Development for Bioinspired Sensing

2006 ◽  
Author(s):  
Chang Liu ◽  
Jonathan Engel ◽  
Jack Chen ◽  
Nannan Chen ◽  
Saunvit Pandya ◽  
...  
Keyword(s):  
Technology Development ◽  
Fabrication Technology ◽  
Nano Scale

LENS (lithography enhancement toward nano scale): a European project to support double exposure and double patterning technology development

2010 ◽  
Author(s):  
Pietro Cantu ◽  
Livio Baldi ◽  
Paolo Piacentini ◽  
Joost Sytsma ◽  
Bertrand Le Gratiet ◽  
...  
Keyword(s):  
Technology Development ◽  
Double Exposure ◽  
Nano Scale ◽  
European Project ◽  
Double Patterning

Fabrication technology development and characterization of tritium permeation barriers by a liquid phase method

2018 ◽  
Vol 136 ◽  
pp. 215-218 ◽  
Author(s):  
Takumi Chikada ◽  
Moeki Matsunaga ◽  
Seira Horikoshi ◽  
Jumpei Mochizuki ◽  
Hikari Fujita ◽  
...  
Keyword(s):  
Liquid Phase ◽  
Technology Development ◽  
Phase Method ◽  
Fabrication Technology ◽  
Liquid Phase Method ◽  
Tritium Permeation

Recent status of fabrication technology development of water cooled ceramic breeder test blanket module in Japan

2011 ◽  
Vol 86 (9-11) ◽  
pp. 2265-2268 ◽  
Author(s):  
Takanori Hirose ◽  
Hisashi Tanigawa ◽  
Akira Yoshikawa ◽  
Yohji Seki ◽  
Daigo Tsuru ◽  
...  
Keyword(s):  
Technology Development ◽  
Fabrication Technology

Advancements in Through Glass Via (TGV) Technology

2015 ◽  
Vol 2015 (DPC) ◽  
pp. 001343-001363
Author(s):  
Aric Shorey ◽  
Rachel Lu ◽  
Scott Pollard ◽  
Ekatarina Kuksenkova ◽  
Gene Smith
Keyword(s):  
Technology Development ◽  
Coefficient Of Thermal Expansion ◽  
Cost Effective ◽  
Mechanical Reliability ◽  
Fabrication Technology ◽  
High Frequencies ◽  
Advanced Packaging ◽  
Downstream Processes ◽  
Electrical Loss ◽  
Made In

Glass provides many opportunities for advanced packaging. The material properties give many opportunities. As an insulator, glass provides advantages in providing low electrical loss, particularly at high frequencies. The relatively high stiffness and ability to adjust coefficient of thermal expansion gives advantages to manage warp in glass core substrates and bonded stacks. Forming processes allow the potential to both form in panel format as well as to form at thicknesses as low as 100 um, giving opportunities to provide cost-effective solutions for the industry. Via fabrication technology development continues to advance providing via diameters < 20 um in size in production ready environment. [1–5] As the industry adopts glass solutions, significant advancements have been made in downstream processes such as glass handling and via/surface metallization. We will provide an update on advancements in these areas as well as handling techniques to achieve desired process flows. There also continues to be increasing amounts of data showing the ability to achieve electrical and thermo-mechanical reliability of substrates with TGV and latest data here will also be provided.

A Study on Focused Ion Beam (FIB) Milling Machining and Fabrication Technology of Nano-Scale Diamond Tool for Machining Fine-Patterns in a Free-Form Surfaces

2021 ◽  
Vol 21 (9) ◽  
pp. 4735-4739
Author(s):  
Sung-Taek Jung ◽  
Hyun-Jeong Kim ◽  
Eun-Chan Wi ◽  
Jung-Shik Kong ◽  
Joo-Hyung Lee ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Diamond Tool ◽  
Ion Beam ◽  
Free Form ◽  
Fabrication Technology ◽  
Optical Components ◽  
Nano Scale ◽  
Single Crystal Diamond ◽  
Ultra Precision ◽  
Free Form Surfaces

Recently, the technology of the industry has been increasing for diffractive optical elements, holograms, optical components, and next-generation display components. The advanced high value-added industry is designing fine patterns on ultra-precision optical components and applying them to various industries. In the case of the ultra-fine pattern, a contact-type machining technique is required because it requires a precise pattern in nano-scale units. In this paper, the fabrication technology of ultra-precision diamond which is essential in the ultra-precision processing technology was suggested. The material used in the experiment was a single-crystal diamond tool (SCD), and the equipment for machining the SCD used a focused ion beam (FEI COMPANY, system Nova 600) equipment. The back fire method was applied without metal coating in order to carry out the process study and the focused beam of 30 keV Ga+ ions were carried out processing for various fabrication of diamond cutting tools. As a result of applying the backfire method through the process experiment, the cutting edge width of the ultra-precision diamond tool was verified 275 nm.

Recent Development of Microceramic Reactors for Advanced Ceramic Reactor System

2010 ◽  
Vol 7 (3) ◽  
Author(s):  
Toshio Suzuki ◽  
Toshiaki Yamaguchi ◽  
Yoshinobu Fujishiro ◽  
Masanobu Awano ◽  
Yoshihiro Funahashi
Keyword(s):  
High Performance ◽  
Technology Development ◽  
Fabrication Technology ◽  
Power Sources ◽  
Power Generators ◽  
Development Organization ◽  
Advanced Ceramic ◽  
New Energy ◽  
Auxiliary Power Units ◽  
Ceramic Reactors

Ceramic reactors, which convert materials and energy electrochemically, are expected to solve various environmental problems, and the use of a microreactor design was shown to realize a high performance reactor with high thermal durability, operable at lower temperatures. Our research project, “Advanced Ceramic Reactor,” supported by the New Energy and Industrial Technology Development Organization, targets to develop new fabrication technology for such microreactors and modules using conventional, commercially available materials. In this study, fabrication technology of microtubular ceramic reactors have been investigated for aiming solid oxide fuel cell (SOFC) applications such as small distributed power generators, auxiliary power units for vehicles, and portable power sources. So far, microtubular SOFCs under a diameter of 1 mm using doped ceria electrolyte, and Ni–ceria based cermet for tubular support has been successfully developed and evaluated. The single microtubular SOFC showed a cell performance of 0.46 W/cm2 (at 0.7 V) at 550°C with H2 fuel. The bundle design for such tubular cell was also proposed and fabricated. The discussion will cover the fabrication technology of a single tubular SOFC and bundle, and the optimization of the cell and bundle design by considering gas pressure loss and current collecting loss.

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