Fabrication of Self-Aligned Enhancement-Mode $ \hbox{In}_{0.53}\hbox{Ga}_{0.47}\hbox{As}$ MOSFETs With $ \hbox{TaN/HfO}_{2}\hbox{/AlN}$ Gate Stack
2008 ◽
Vol 29
(6)
◽
pp. 557-560
◽
2019 ◽
Vol 66
(4)
◽
pp. 1710-1716
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