High-Performance Condenser Microphone With Single-Crystalline Silicon Diaphragm and Backplate

2007 ◽  
Vol 7 (1) ◽  
pp. 4-10 ◽  
Author(s):  
Masahide Goto ◽  
Yoshinori Iguchi ◽  
Kazuho Ono ◽  
Akio Ando ◽  
Futoshi Takeshi ◽  
...  
Keyword(s):  
High Performance ◽  
Crystalline Silicon ◽  
Single Crystalline Silicon ◽  
Single Crystalline ◽  
Condenser Microphone

High-performance ultra-small single crystalline silicon microphone of an integrated structure

2003 ◽  
Vol 67-68 ◽  
pp. 508-519 ◽  
Author(s):  
T. Tajima ◽  
T. Nishiguchi ◽  
S. Chiba ◽  
A. Morita ◽  
M. Abe ◽  
...  
Keyword(s):  
High Performance ◽  
Crystalline Silicon ◽  
Single Crystalline Silicon ◽  
Single Crystalline ◽  
Silicon Microphone

scholarly journals Dielectric ceramics/TiO2/single-crystalline silicon nanomembrane heterostructure for high performance flexible thin-film transistors on plastic substrates

RSC Advances ◽  
2019 ◽  
Vol 9 (60) ◽  
pp. 35289-35296 ◽  
Author(s):  
Guoxuan Qin ◽  
Zhihui Pei ◽  
Yibo Zhang ◽  
Kuibo Lan ◽  
Quanning Li ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
High Performance ◽  
Crystalline Silicon ◽  
Single Crystalline Silicon ◽  
Single Crystalline ◽  
Plastic Substrates ◽  
Silicon Nanomembrane ◽  
Dielectric Ceramics

Dielectric ceramics/TiO2/single-crystalline silicon nanomembrane heterostructure for high performance flexible thin-film transistors.

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