Surface-micromachined 2-D optical scanners with high-performance single-crystalline silicon micromirrors

2001 ◽  
Vol 13 (6) ◽  
pp. 606-608 ◽  
Author(s):  
G.-D.J. Su ◽  
H. Toshiyoshi ◽  
M.C. Wu
Keyword(s):  
High Performance ◽  
Crystalline Silicon ◽  
Single Crystalline Silicon ◽  
Optical Scanners ◽  
Single Crystalline

High-Performance Condenser Microphone With Single-Crystalline Silicon Diaphragm and Backplate

2007 ◽  
Vol 7 (1) ◽  
pp. 4-10 ◽  
Author(s):  
Masahide Goto ◽  
Yoshinori Iguchi ◽  
Kazuho Ono ◽  
Akio Ando ◽  
Futoshi Takeshi ◽  
...  
Keyword(s):  
High Performance ◽  
Crystalline Silicon ◽  
Single Crystalline Silicon ◽  
Single Crystalline ◽  
Condenser Microphone

High-performance ultra-small single crystalline silicon microphone of an integrated structure

2003 ◽  
Vol 67-68 ◽  
pp. 508-519 ◽  
Author(s):  
T. Tajima ◽  
T. Nishiguchi ◽  
S. Chiba ◽  
A. Morita ◽  
M. Abe ◽  
...  
Keyword(s):  
High Performance ◽  
Crystalline Silicon ◽  
Single Crystalline Silicon ◽  
Single Crystalline ◽  
Silicon Microphone
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