Ovenized high frequency oscillators based on aluminum nitride contour-mode MEMS resonators

2011 ◽  
Author(s):  
Augusto Tazzoli ◽  
Matteo Rinaldi ◽  
Gianluca Piazza
Keyword(s):  
Aluminum Nitride ◽  
High Frequency ◽  
Mems Resonators ◽  
Contour Mode

scholarly journals Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators

2006 ◽  
Vol 15 (6) ◽  
pp. 1406-1418 ◽  
Author(s):  
Gianluca Piazza ◽  
Philip J. Stephanou ◽  
Albert P. Pisano
Keyword(s):  
Aluminum Nitride ◽  
Mems Resonators ◽  
Contour Mode

Nano-Gap Piezoelectric Resonators for Mechanical RF Magnetic Field Modulation

2005 ◽  
Author(s):  
C. D. White ◽  
G. Piazza ◽  
P. J. Stephanou ◽  
A. P. Pisano
Keyword(s):  
Magnetic Fields ◽  
High Frequency ◽  
Frequency Range ◽  
Static Magnetic Fields ◽  
Nickel Iron ◽  
Mems Resonators ◽  
Field Modulation ◽  
20 Nm ◽  
Contour Mode ◽  
Rf Magnetic Field

Novel piezoelectric MEMS resonators with magnetic shielding have been developed to mechanically generate RF magnetic fields in the MHz frequency range from static magnetic fields. Thermally evaporated thin film nickel iron (NiFe) (10 to 20 nm) was deposited with a saturation flux density of 0.5 T, coercivity of 500 A/m and a high relative permeability of 3.7 × 103. Aluminum nitride (AlN) resonators developed for high frequency operation, resonate in a contour mode to increase and decrease a gap surrounding the resonator. This gap, 200 to 350 nm, is formed using a silicon sidewall deposition as a sacrificial spacer. Resonators with frequencies up to 60 MHz have been fabricated and tested.

Heterogeneously Integrated Aluminum Nitride MEMS Resonators and Filters

2021 ◽  
pp. 113-130
Author(s):  
Enes Calayir ◽  
Srinivas Merugu ◽  
Jaewung Lee ◽  
Navab Singh ◽  
Gianluca Piazza
Keyword(s):  
Aluminum Nitride ◽  
Mems Resonators
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