Single contact optical beam induced currents (SCOBIC)-technique and applications

2002 ◽  
Author(s):  
J.M. Chin ◽  
M. Palaniappan ◽  
J.C.H. Phang ◽  
D.S.H. Chan ◽  
C.E. Soh ◽  
...  
Keyword(s):  
Optical Beam ◽  
Induced Currents ◽  
Single Contact

Single contact optical beam induced currents

2001 ◽  
Vol 41 (8) ◽  
pp. 1237-1242 ◽  
Author(s):  
J.M Chin ◽  
J.C.H Phang ◽  
D.S.H Chan ◽  
M Palaniappan ◽  
G Gilfeather ◽  
...  
Keyword(s):  
Optical Beam ◽  
Induced Currents ◽  
Single Contact

Application of Single Contact Optical Beam Induced Currents (SCOBIC) for Backside Failure Analysis

2000 ◽  
Author(s):  
M. Palaniappan ◽  
J.M. Chin ◽  
J.C.H. Phang ◽  
D.S.H. Chan ◽  
C.E. Soh ◽  
...  
Keyword(s):  
Failure Analysis ◽  
Integrated Circuit ◽  
Optical Beam ◽  
Analysis Technique ◽  
Induced Currents ◽  
Single Contact

Abstract The Single Contact Optical Beam Induced Currents (SCOBIC) is a new failure analysis technique, which allows the imaging of junctions by a single connection to the substrate or power pin of an integrated circuit. Modern packaging technologies and multi-layer metallizations has increased the need for backside IC failure analysis. In this paper, the SCOBIC technique is used to image junctions from the die backside. The implementation of backside SCOBIC system is discussed. Application of the SCOBIC technique from both the frontside and backside of CMOS and NMOS devices are presented.

Optical beam induced currents in MOS transistors

1990 ◽  
Vol 12 (1-4) ◽  
pp. 381-388 ◽  
Author(s):  
Joachim Fritz ◽  
Rainer Lackmann
Keyword(s):  
Optical Beam ◽  
Mos Transistors ◽  
Induced Currents

Time resolved optical beam induced currents: A novel technique to image spatio-temporal phenomena in semiconductors

1995 ◽  
Vol 152 (1) ◽  
pp. 281-286
Author(s):  
J. H. Wolter ◽  
C. M. van Es ◽  
J. E. M. Haverkort ◽  
E. A. E. Zwaal
Keyword(s):  
Optical Beam ◽  
Time Resolved ◽  
Novel Technique ◽  
Induced Currents ◽  
Spatio Temporal

Optical Beam Induced Currents: Investigations of Integrated Circuits Using Different Excitation Wavelengths

1989 ◽  
Vol 36 (12) ◽  
pp. 1621-1629 ◽  
Author(s):  
Harald Bergner ◽  
Tobias Damm ◽  
Christian Koch ◽  
Hanno Seidel
Keyword(s):  
Integrated Circuits ◽  
Optical Beam ◽  
Induced Currents
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