ITO electrode patterns were fabricated using excimer laser direct-writing technique. The influence of the process parameters (the excimer laser fluence and the stage velocity) on the micromachining quality (the etching depth and ridge height of the edge ) of ITO patterns were experimentally studied. In this paper, the effect of laser fluence and the speed of working platform on the fabrication quality were discussed. The lower laser fluence and suitable platform speed will be very helpful to improve the edge quality of patterning of ITO. However, the recast ridge at the edge also was shown. Use of 39% solution of hydrochloric acid made it possible to further minimize the recast ridge at the edges.
AbstractThe deposition of titanium lines by KrF excimer laser direct writing on lithium niobate (LiNbO3) has been investigated. A detailled study of the line profile has been performed since this is critical in the fabrication of Ti:LiNbO3 optical waveguides. We show that at a low power density E, the maximum thickness t is proportional to E, while increasing E leads to the diffusion of Ti into LiNbO3 resulting in a saturation and even a decrease in thickness. Preliminary results on Ti:LiNbO3 optical waveguides show that their characteristics are similar to those made by conventional methods.
Laser-direct writing has become an alternative method to fabricate flexible electronics, whereas the resistive nature of laser-scribed conductors may distort the radio-frequency characteristics of circuits for high-frequency applications. We demonstrate that the transmission characteristics of microstrip lines are insensitive to the resistance of laser-scripted conductors when the sheet resistance is not above 0.32 Ω/□. On the other hand, the transmission and reflection characteristics of the MS lines can be simply modified through the accommodation of the resistance of the conductors, because a laser can trigger the sintering and melting of laser produced silver nanostructures. This could provide an alternative way to fabricate radio frequency (RF) resistors and promote their applications to flexible radio-frequency devices and systems.
Laser-Scribed Lossy Microstrip Lines for Radio Frequency Applications