157nm resist material design for improvement of its transparency by using highly precise theoretical calculation
2003 ◽
Vol 42
(Part 1, No. 6B)
◽
pp. 3881-3884
2005 ◽
Vol 125
◽
pp. 539-541
◽
Keyword(s):
2013 ◽
Vol 4
(4)
◽
pp. 339-347
2019 ◽
2017 ◽
Vol 2
(1)
◽
pp. 51
Keyword(s):
2020 ◽
Vol 27
(38)
◽
pp. 6523-6535
◽
Keyword(s):