The study for substrate temperature effects on thermoelectric properties of the amorphous Si-Ge-Au thin films

2003 ◽  
Author(s):  
A. Miyata ◽  
Y. Sato ◽  
Y. Okamoto ◽  
T. Kawahara ◽  
J. Morimoto
Keyword(s):  
Thin Films ◽  
Substrate Temperature ◽  
Thermoelectric Properties ◽  
Temperature Effects ◽  
Amorphous Si ◽  
Au Thin Films

Substrate temperature effects on the growth and properties of γ-MnS thin films grown by rf sputtering

2002 ◽  
Vol 37 (10) ◽  
pp. 1749-1754 ◽  
Author(s):  
I Oidor-Juárez ◽  
P Garcı́a-Jiménez ◽  
G Torres-Delgado ◽  
R Castanedo-Pérez ◽  
O Jiménez-Sandoval ◽  
...  
Keyword(s):  
Thin Films ◽  
Substrate Temperature ◽  
Temperature Effects ◽  
Rf Sputtering

scholarly journals Thermoelectric Properties of Amorphous Ge/Au and Si/Au Thin Films

2004 ◽  
Vol 124 (4) ◽  
pp. 307-311 ◽  
Author(s):  
Akiko Miyata ◽  
Makoto Abe ◽  
Yoichi Okamoto ◽  
Toshio Kawahara ◽  
Jun Morimoto ◽  
...  
Keyword(s):  
Thin Films ◽  
Thermoelectric Properties ◽  
Au Thin Films

Thermoelectric Properties of Nanograined Si-Ge-Au Thin Films Grown by Molecular Beam Deposition

2017 ◽  
Vol 47 (6) ◽  
pp. 3267-3272 ◽  
Author(s):  
Shunsuke Nishino ◽  
Satoshi Ekino ◽  
Manabu Inukai ◽  
Muthusamy Omprakash ◽  
Masahiro Adachi ◽  
...  
Keyword(s):  
Thin Films ◽  
Thermoelectric Properties ◽  
Molecular Beam ◽  
Molecular Beam Deposition ◽  
Au Thin Films ◽  
Beam Deposition

Substrate Temperature Effects on the Properties of Radio Frequency-Sputtered SnS Thin Films

2018 ◽  
Vol 10 (5) ◽  
pp. 696-702 ◽  
Author(s):  
Donghyun Hwang ◽  
Jin-Yong Shin ◽  
Sunmook Lee ◽  
Joo Hyung Park ◽  
Chang-Sik Son
Keyword(s):  
Thin Films ◽  
Substrate Temperature ◽  
Radio Frequency ◽  
Temperature Effects ◽  
Sns Thin Films

Substrate temperature effects on the microhardness and adhesion of diamond-like thin films

1999 ◽  
Vol 8 (2-5) ◽  
pp. 563-566 ◽  
Author(s):  
E Martinez ◽  
M.C Polo ◽  
E Pascual ◽  
J Esteve
Keyword(s):  
Thin Films ◽  
Substrate Temperature ◽  
Temperature Effects

Deposition of n-Type Bi2Te3 Thin Films on Polyimide by Using RF Magnetron Co-Sputtering Method

2015 ◽  
Vol 15 (10) ◽  
pp. 8299-8304 ◽  
Author(s):  
Sung-Jae Joo ◽  
Bong Seo Kim ◽  
Bok-Ki Min ◽  
Min Wook Oh ◽  
Ji-Eun Lee ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Composition ◽  
Seebeck Coefficient ◽  
Substrate Temperature ◽  
Thermoelectric Properties ◽  
Layered Structure ◽  
Radius Of Curvature ◽  
X Ray ◽  
Coefficient Measurement ◽  
Thermoelectric Thin Films

Bi2Te3 thermoelectric thin films were deposited on the flexible polyimide substrates by RF magnetron co-sputtering of a Bi and a Te targets. The influence of the substrate temperature and RF power on the microstructure, chemical composition, and the thermoelectric properties of the sputtered films was investigated by using scanning electron microscopy, X-ray diffraction, energy dispersive X-ray spectroscopy, and in-plane resistivity/Seebeck coefficient measurement. It was shown that the thermoelectric properties of the films depend sensitively on the Bi/Te chemical composition ratio and the substrate temperature, and the layered structure was clearly observed from the cross section of the (00L)-oriented, nearly stoichiometric Bi2Te3 films when the substrate temperature is higher than 250 °C. As-deposited Bi2Te3 films deposited at 300 °C show the highest power factor of 0.97 mW/K2m and the Seebeck coefficient of −193 μV/K at 32 °C, which also have (00L) preferred orientation and the layered structure. The durability of the Bi2Te3 films on polyimide against repeated bending was also tested by monitoring the film resistance, and it was concluded that the Bi2Te3 films are applicable reliably on the curved surfaces with the radius of curvature larger than 5 mm.

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