MicroTec-3.00 for Windows: educational semiconductor process and device simulator

Proceedings of the 1998 Second IEEE International Caracas Conference on Devices, Circuits and Systems. ICCDCS 98. On the 70th Anniversary of the MOSFET and 50th of the BJT. (Cat. No.98TH8350) ◽

10.1109/iccdcs.1998.705802 ◽

2002 ◽

Author(s):

M.S. Obrecht

Keyword(s):

Semiconductor Process

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A power amplifier with bandwidth expansion and linearity enhancement in 130 nm complementary metal‐oxide‐semiconductor process

International Journal of RF and Microwave Computer-Aided Engineering ◽

10.1002/mmce.22626 ◽

2021 ◽

Author(s):

Cheng Cao ◽

Jiangfan Liu ◽

Yubing Li ◽

Tao Tan ◽

Zemeng Huang ◽

...

Keyword(s):

Metal Oxide ◽

Power Amplifier ◽

Complementary Metal Oxide Semiconductor ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Bandwidth Expansion ◽

Semiconductor Process

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Gridding techniques for the level set method in semiconductor process and device simulation

SISPAD '97. 1997 International Conference on Simulation of Semiconductor Processes and Devices. Technical Digest ◽

10.1109/sispad.1997.621404 ◽

2002 ◽

Author(s):

E.C. Kan ◽

Ze-Kai Hsiau ◽

V. Rao ◽

R.W. Dutton

Keyword(s):

Level Set Method ◽

Level Set ◽

Device Simulation ◽

Semiconductor Process

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Monitoring of a sampled process data under Run-to-Run control: application to a semiconductor process

2019 IEEE 15th International Conference on Automation Science and Engineering (CASE) ◽

10.1109/coase.2019.8843229 ◽

2019 ◽

Author(s):

Taki Eddine Korabi ◽

Guillaume Graton ◽

El Mostafa El Adel ◽

Mustapha Ouladsine ◽

Jacques Pinaton

Keyword(s):

Process Data ◽

Control Application ◽

Semiconductor Process ◽

Sampled Process

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Fourier Transform Infrared (FTIR) Spectroscopy for Monitoring Semiconductor Process Gas Emissions

Applied Industrial Hygiene ◽

10.1080/08828032.1986.10390478 ◽

1986 ◽

Vol 1 (2) ◽

pp. 110-112 ◽

Cited By ~ 13

Author(s):

William F. Herget ◽

Steven P. Levine

Keyword(s):

Fourier Transform ◽

Ftir Spectroscopy ◽

Fourier Transform Infrared ◽

Gas Emissions ◽

Process Gas ◽

Semiconductor Process

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2006 International Conference on Simulation of Semiconductor Process and Devices

Journal of Microelectromechanical Systems ◽

10.1109/jmems.2005.858909 ◽

2005 ◽

Vol 14 (5) ◽

pp. 1209-1209

Keyword(s):

International Conference ◽

Semiconductor Process

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Wide Spectral Characteristics of Si Photonic Crystal Mach-Zehnder Modulator Fabricated by Complementary Metal-Oxide-Semiconductor Process

Photonics ◽

10.3390/photonics3020017 ◽

2016 ◽

Vol 3 (2) ◽

pp. 17 ◽

Cited By ~ 17

Author(s):

Yosuke Hinakura ◽

Yosuke Terada ◽

Takuya Tamura ◽

Toshihiko Baba

Keyword(s):

Photonic Crystal ◽

Metal Oxide ◽

Spectral Characteristics ◽

Complementary Metal Oxide Semiconductor ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Mach Zehnder Modulator ◽

Semiconductor Process

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Total-reflection X-ray fluorescence analysis for semiconductor process characterization

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/s0584-8547(03)00212-x ◽

2003 ◽

Vol 58 (12) ◽

pp. 2085-2092 ◽

Cited By ~ 2

Author(s):

Yoshihiro Mori ◽

Kenichi Uemura

Keyword(s):

Fluorescence Analysis ◽

Total Reflection ◽

X Ray ◽

Process Characterization ◽

Semiconductor Process

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Emerging role of semiconductor process equipment to overcome device failure mechanisms

1997 IEEE International Reliability Physics Symposium Proceedings. 35th Annual ◽

10.1109/relphy.1997.584214 ◽

2002 ◽

Cited By ~ 1

Author(s):

A.K. Sinha ◽

F. Moghadam ◽

R. Mosley ◽

M. Chang ◽

R. Ellwanger

Keyword(s):

Failure Mechanisms ◽

Process Equipment ◽

Device Failure ◽

Semiconductor Process

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Large-Scale Semiconductor Process Fault Detection Using a Fast Pattern Recognition-Based Method

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2010.2041289 ◽

2010 ◽

Vol 23 (2) ◽

pp. 194-200 ◽

Cited By ~ 49

Author(s):

Qinghua Peter He ◽

Jin Wang

Keyword(s):

Pattern Recognition ◽

Fault Detection ◽

Large Scale ◽

Semiconductor Process

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Improved Methodology for Measurement of Particle Concentrations in Semiconductor Process Chemicals

Particles in Gases and Liquids 1 ◽

10.1007/978-1-4613-0793-8_6 ◽

1989 ◽

pp. 121-134 ◽

Cited By ~ 4

Author(s):

Donald C. Grant

Keyword(s):

Semiconductor Process

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