Particles in Gases and Liquids 1
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9781461280859, 9781461307938
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Particulate Generation in Devices Used in Clean Manufacturing

1989 ◽  
pp. 283-293 ◽  
Author(s):  
H. S. Nagaraj ◽  
B. L. Owens ◽  
R. J. Miller
Keyword(s):  
Clean Manufacturing

Particle Removal from Semiconductor Wafers Using Cleaning Solvents

1989 ◽  
pp. 259-271 ◽  
Author(s):  
V. B. Menon ◽  
L. D. Michaels ◽  
R. P. Donovan ◽  
V. L. Debler ◽  
M. B. Ranade
Keyword(s):  
Particle Removal ◽  
Cleaning Solvents

Non-Poisson Models of Particle Counting

1989 ◽  
pp. 51-79 ◽  
Author(s):  
R. A. Van Slooten ◽  
M. L. Malczewski
Keyword(s):  
Poisson Models ◽  
Particle Counting

A Fluid Dynamic Study of a Microcontaminant Particles Removal Process

1989 ◽  
pp. 235-257 ◽  
Author(s):  
Ahmed A. Busnaina ◽  
M. A. R. Sharif ◽  
Glenn Gale ◽  
Frederick W. Kern
Keyword(s):  
Fluid Dynamic ◽  
Dynamic Study ◽  
Removal Process

A Real-Time Fallout Monitor for 5–250 Micrometer Particles

1989 ◽  
pp. 175-184 ◽  
Author(s):  
Peter G. Borden ◽  
Jon Munson ◽  
Donald W. Bartelson
Keyword(s):  
Real Time
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