Comprehensive study of the impact of TSV induced thermo-mechanical stress on 3D IC device performance

Author(s):  
Hui Min Lee ◽  
Er-Ping Li ◽  
En-Xiao Liu ◽  
G. S. Samudra
2021 ◽  
pp. 159142
Author(s):  
Khushboo Punia ◽  
Ganesh Lal ◽  
Saurabh Dalela ◽  
Satya Narain Dolia ◽  
Parvez Ahmad Alvi ◽  
...  

2001 ◽  
Vol 664 ◽  
Author(s):  
C. Y. Wang ◽  
E. H. Lim ◽  
H. Liu ◽  
J. L. Sudijono ◽  
T. C. Ang ◽  
...  

ABSTRACTIn this paper the impact of the ESL (Etch Stop layer) nitride on the device performance especially the threshold voltage (Vt) has been studied. From SIMS analysis, it is found that different nitride gives different H concentration, [H] in the Gate oxide area, the higher [H] in the nitride film, the higher H in the Gate Oxide area and the lower the threshold voltage. It is also found that using TiSi instead of CoSi can help to stop the H from diffusing into Gate Oxide/channel area, resulting in a smaller threshold voltage drift for the device employed TiSi. Study to control the [H] in the nitride film is also carried out. In this paper, RBS, HFS and FTIR are used to analyze the composition changes of the SiN films prepared using Plasma enhanced Chemical Vapor deposition (PECVD), Rapid Thermal Chemical Vapor Deposition (RTCVD) with different process parameters. Gas flow ratio, RF power and temperature are found to be the key factors that affect the composition and the H concentration in the film. It is found that the nearer the SiN composition to stoichiometric Si3N4, the lower the [H] in SiN film because there is no excess silicon or nitrogen to be bonded with H. However the lowest [H] in the SiN film is limited by temperature. The higher the process temperature the lower the [H] can be obtained in the SiN film and the nearer the composition to stoichiometric Si3N4.


Author(s):  
Tiantao Lu ◽  
Ankur Srivastava

This paper presents an electrical-thermal-reliability co-design technique for TSV-based 3D-ICs. Although TSV-based 3D-IC shows significant electrical performance improvement compared to traditional 2D circuit, researchers have reported strong electromigration (EM) in TSVs, which is induced by the thermal mechanical stress and the local temperature hotspot. We argue that rather than addressing 3D-IC’s EM issue after the IC designing phase, the designer should be aware of the circuit’s thermal and EM properties during the IC designing phase. For example, one should be aware that the TSVs establish vertical heat conduction path thus changing the chip’s thermal profile and also produce significant thermal mechanical stress to the nearby TSVs, which deteriorates other TSV’s EM reliability. Therefore, the number and location of TSVs play a crucial role in deciding 3D-IC’s electrical performance, changing its thermal profile, and affecting its EM-reliability. We investigate the TSV placement problem, in order to improve 3D-IC’s electrical performance and enhance its thermal-mechanical reliability. We derive and validate simple but accurate thermal and EM models for 3D-IC, which replace the current employed time-consuming finite-element-method (FEM) based simulation. Based on these models, we propose a systematic optimization flow to solve this TSV placement problem. Results show that compared to conventional performance-centered technique, our design methodology achieves 3.24x longer EM-lifetime, with only 1% performance degradation.


2015 ◽  
Vol 210 ◽  
pp. 264-271 ◽  
Author(s):  
Kiki A. Kurnia ◽  
Catarina M.S.S. Neves ◽  
Mara G. Freire ◽  
Luís M.N.B.F. Santos ◽  
João A.P. Coutinho

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