Deep, High Aspect Ratio Etches in Alumina Films for MEMS and Advanced Packages

2016 ◽  
Author(s):  
Dogukan Yildirim ◽  
Guann-Pyng Li ◽  
Mark Bachman
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Alumina Films

Anodic Alumina MEMS: Applications and Devices

2000 ◽  
Author(s):  
Alexander Govyadinov ◽  
Peter Mardilovich ◽  
Kathy Novogradecz ◽  
Stephanie Hooker ◽  
Dmitri Routkevitch
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Anodic Alumina ◽  
Surface Micromachining ◽  
Application Development ◽  
Promising Technology ◽  
Alumina Films ◽  
Vacuum Microelectronics

Abstract Hybrid micromachining of anodic alumina films was shown to be a promising technology for creating ceramic MEMS for harsh application environments. By combining features of both bulk and surface micromachining, this technology offers flexibility in design and tremendous application opportunities. This paper will overview the authors’ work on application development of micromachined anodic alumina, with the main focus on gas microsensors, vacuum microelectronics, and high aspect ratio MEMS.

Boehmite Nanofibers as a Dispersant for Nanotubes in an Aqueous Sol

2018 ◽  
Author(s):  
Gen Hayase
Keyword(s):  
Carbon Nanotubes ◽  
Aspect Ratio ◽  
Aqueous Solutions ◽  
High Aspect Ratio ◽  
Multiwall Carbon Nanotubes ◽  
Multiwall Carbon ◽  
Nanotube Films

By exploiting the dispersibility and rigidity of boehmite nanofibers (BNFs) with a high aspect ratio of 4 nm in diameter and several micrometers in length, multiwall-carbon nanotubes (MWCNTs) were successfully dispersed in aqueous solutions. In these sols, the MWCNTs were dispersed at a ratio of about 5–8% relative to BNFs. Self-standing BNF–nanotube films were also obtained by filtering these dispersions and showing their functionality. These films can be expected to be applied to sensing materials.

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