Anodic Alumina MEMS: Applications and Devices

2000 ◽  
Author(s):  
Alexander Govyadinov ◽  
Peter Mardilovich ◽  
Kathy Novogradecz ◽  
Stephanie Hooker ◽  
Dmitri Routkevitch
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Anodic Alumina ◽  
Surface Micromachining ◽  
Application Development ◽  
Promising Technology ◽  
Alumina Films ◽  
Vacuum Microelectronics

Abstract Hybrid micromachining of anodic alumina films was shown to be a promising technology for creating ceramic MEMS for harsh application environments. By combining features of both bulk and surface micromachining, this technology offers flexibility in design and tremendous application opportunities. This paper will overview the authors’ work on application development of micromachined anodic alumina, with the main focus on gas microsensors, vacuum microelectronics, and high aspect ratio MEMS.

Structural engineering of nanoporous anodic alumina funnels with high aspect ratio

2011 ◽  
Vol 655 (1) ◽  
pp. 73-78 ◽  
Author(s):  
Abel Santos ◽  
Pilar Formentín ◽  
Josep Pallarès ◽  
Josep Ferré-Borrull ◽  
Lluís F. Marsal
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Structural Engineering ◽  
Anodic Alumina ◽  
Nanoporous Anodic Alumina

scholarly journals Fabrication of a novel aluminum surface covered by numerous high-aspect-ratio anodic alumina nanofibers

2015 ◽  
Vol 356 ◽  
pp. 54-62 ◽  
Author(s):  
Daiki Nakajima ◽  
Tatsuya Kikuchi ◽  
Shungo Natsui ◽  
Norihito Sakaguchi ◽  
Ryosuke O. Suzuki
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Anodic Alumina ◽  
Aluminum Surface ◽  
Alumina Nanofibers
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