Micromachined cavity-based bandpass filter and suspended planar slow-wave structure for vacuum-microelectronic millimeter-wave/THz microsystem embedded in LTCC packaging substrates
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2011 ◽
Vol 33
(2)
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pp. 131-140
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2009 ◽
Vol 26
(11)
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pp. 114103
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2010 ◽
Vol 64
(2)
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pp. 177-185
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2014 ◽
Vol 42
(12)
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pp. 3949-3960
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2010 ◽
Vol 57
(12)
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pp. 3500-3507
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2007 ◽
Vol 28
(9)
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pp. 779-787
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2013 ◽
Vol 60
(11)
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pp. 3895-3900
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