Synthesis of RF circuits for embedded passive components in mixed signal applications

Author(s):  
Kwang Lim Choi ◽  
M. Swaminathan
Author(s):  
Haruo Kobayashi ◽  
Nene Kushita ◽  
Minh Tri Tran ◽  
Koji Asami ◽  
Hao San ◽  
...  

Author(s):  
Marie Capelle ◽  
Jérome Billoué ◽  
Patrick Poveda ◽  
Gael Gautier

The silicon/porous silicon (PS) hybrid substrate is an interesting candidate for the monolithic integration of radiofrequency (RF) circuits. Thus, passive components can be integrated on the insulating PS regions close to the active devices integrated on silicon. Regarding silicon, hybrid substrates allow the improvement of RF circuits performances. To demonstrate it, coplanar waveguides have been integrated on glass, silicon, and localized PS substrates. The characterization results show that the substrate losses are reduced with PS.


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