A dual-axis MEMS inertial sensor using multi-layered high-density metal for an arrayed CMOS-MEMS accelerometer

2014 ◽  
Author(s):  
Daisuke Yamane ◽  
Takaaki Matsushima ◽  
Toshifumi Konishi ◽  
Hiroshi Toshiyoshi ◽  
Katsuyuki Machida ◽  
...  
Keyword(s):  
Inertial Sensor ◽  
High Density ◽  
Mems Accelerometer ◽  
Cmos Mems

scholarly journals Displacement Estimation Based on Optical and Inertial Sensor Fusion

Sensors ◽  
2021 ◽  
Vol 21 (4) ◽  
pp. 1390
Author(s):  
Tomasz Ursel ◽  
Michał Olinski
Keyword(s):  
Sensor Fusion ◽  
Inertial Sensor ◽  
External Disturbance ◽  
Linear Displacement ◽  
Measuring System ◽  
Displacement Estimation ◽  
Mems Accelerometer ◽  
Pedestrian Navigation ◽  
Complementary Filter ◽  
Optical Flow Sensor

This article aims to develop a system capable of estimating the displacement of a moving object with the usage of a relatively cheap and easy to apply sensors. There is a growing need for such systems, not only for robots, but also, for instance, pedestrian navigation. In this paper, the theory for this idea, including data postprocessing algorithms for a MEMS accelerometer and an optical flow sensor (OFS), as well as the developed complementary filter applied for sensor fusion, are presented. In addition, a vital part of the accelerometer’s algorithm, the zero velocity states detection, is implemented. It is based on analysis of the acceleration’s signal and further application of acceleration symmetrization, greatly improving the obtained displacement. A test stand with a linear guide and motor enabling imposing a specified linear motion is built. The results of both sensors’ testing suggest that the displacement estimated by each of them is highly correct. Fusion of the sensors’ data gives even better outcomes, especially in cases with external disturbance of OFS. The comparative evaluation of estimated linear displacements, in each case related to encoder data, confirms the algorithms’ operation correctness and proves the chosen sensors’ usefulness in the development of a linear displacement measuring system.

A CMOS-MEMS Accelerometer with U-channel Suspended Gate SOI FET

2021 ◽  
pp. 1-1
Author(s):  
Pramod Martha ◽  
Naveen Kadayinti ◽  
V. Seena
Keyword(s):  
Mems Accelerometer ◽  
Cmos Mems

A Novel CMOS MEMS Accelerometer with Four Sensing Finger Arrays

2006 ◽  
Author(s):  
Chih-Mimg Sun ◽  
Chuan-Wei Wang ◽  
Dong Hang Liu ◽  
M.S.-C. Lu ◽  
Weileun Fang ◽  
...  
Keyword(s):  
Mems Accelerometer ◽  
Cmos Mems

scholarly journals A Robust Fully-Integrated Digital-Output Inductive CMOS-MEMS Accelerometer with Improved Inductor Quality Factor

Micromachines ◽  
2019 ◽  
Vol 10 (11) ◽  
pp. 792
Author(s):  
Chiu ◽  
Liu ◽  
Hong
Keyword(s):  
Quality Factor ◽  
Complementary Metal Oxide Semiconductor ◽  
Oxide Semiconductor ◽  
Mems Devices ◽  
Digital Output ◽  
Detection Scheme ◽  
Mems Accelerometer ◽  
Analog To Digital Conversion ◽  
Cmos Mems ◽  
In Series

This paper presents the design, fabrication, and characterization of an inductive complementary metal oxide semiconductor micro-electromechanical systems (CMOS-MEMS) accelerometer with on-chip digital output based on LC oscillators. While most MEMS accelerometers employ capacitive detection schemes, the proposed inductive detection scheme is less susceptible to the stress-induced structural curling and deformation that are commonly seen in CMOS-MEMS devices. Oscillator-based frequency readout does not need analog to digital conversion and thus can simplify the overall system design. In this paper, a high-Q CMOS inductor was connected in series with the low-Q MEMS sensing inductor to improve its quality factor. Measurement results showed the proposed device had an offset frequency of 85.5 MHz, sensitivity of 41.6 kHz/g, noise floor of 8.2 mg/Hz, bias instability of 0.94 kHz (11 ppm) at an average time of 2.16 s, and nonlinearity of 1.5% full-scale.

A sub-1G CMOS-MEMS accelerometer

2015 ◽  
Author(s):  
Daisuke Yamane ◽  
Toshifumi Konishi ◽  
Motohiro Takayasu ◽  
Hiroyuki Ito ◽  
Shiro Dosho ◽  
...  
Keyword(s):  
Mems Accelerometer ◽  
Cmos Mems

A dual-axis MEMS capacitive inertial sensor with high-density proof mass

2015 ◽  
Vol 22 (3) ◽  
pp. 459-464 ◽  
Author(s):  
Daisuke Yamane ◽  
Takaaki Matsushima ◽  
Toshifumi Konishi ◽  
Hiroshi Toshiyoshi ◽  
Kazuya Masu ◽  
...  
Keyword(s):  
Proof Mass ◽  
Inertial Sensor ◽  
High Density
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