DC and high current pulsed magnetron discharge for generation of boron plasmas
2011 ◽
Vol 37
(7)
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pp. 621-627
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Keyword(s):
Keyword(s):
Keyword(s):
2012 ◽
Vol 101A
(6)
◽
pp. 1800-1812
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Keyword(s):
2006 ◽
Vol 45
(10B)
◽
pp. 8090-8094
◽
2009 ◽
Vol 6
(S1)
◽
pp. S6-S10
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