Evolution of the electron energy distribution and plasma parameters in a pulsed magnetron discharge

J. T. Gudmundsson; J. Alami; U. Helmersson

doi:10.1063/1.1376150

Evolution of the electron energy distribution and plasma parameters in a pulsed magnetron discharge

Applied Physics Letters ◽

10.1063/1.1376150 ◽

2001 ◽

Vol 78 (22) ◽

pp. 3427-3429 ◽

Cited By ~ 118

Author(s):

J. T. Gudmundsson ◽

J. Alami ◽

U. Helmersson

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution ◽

Plasma Parameters ◽

Magnetron Discharge ◽

Pulsed Magnetron

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Measurements of electron energy distribution functions and electron transport in the downstream region of an unbalanced dc magnetron discharge

Plasma Sources Science and Technology ◽

10.1088/0963-0252/13/3/007 ◽

2004 ◽

Vol 13 (3) ◽

pp. 409-419 ◽

Cited By ~ 34

Author(s):

Sang-Hun Seo ◽

Jung-Hwan In ◽

Hong-Young Chang

Keyword(s):

Electron Transport ◽

Energy Distribution ◽

Electron Energy ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Magnetron Discharge ◽

Downstream Region ◽

Energy Distribution Functions

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Electron energy distribution function and plasma parameters across magnetic filters

Applied Physics Letters ◽

10.1063/1.3680088 ◽

2012 ◽

Vol 100 (4) ◽

pp. 044102 ◽

Cited By ~ 56

Author(s):

A. Aanesland ◽

J. Bredin ◽

P. Chabert ◽

V. Godyak

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Plasma Parameters

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Spatial measurements of electron energy distribution and plasma parameters in a weakly magnetized inductive discharge

Physics of Plasmas ◽

10.1063/1.4790664 ◽

2013 ◽

Vol 20 (2) ◽

pp. 023505 ◽

Cited By ~ 3

Author(s):

Young-Do Kim ◽

Young-Kwang Lee ◽

Hyo-Chang Lee ◽

Chin-Wook Chung

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution ◽

Plasma Parameters ◽

Inductive Discharge

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Plasma parameters and electron energy distribution functions in a magnetically focused plasma

Physics of Plasmas ◽

10.1063/1.4794841 ◽

2013 ◽

Vol 20 (3) ◽

pp. 034502 ◽

Cited By ~ 11

Author(s):

C. M. Samuell ◽

B. D. Blackwell ◽

J. Howard ◽

C. S. Corr

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Plasma Parameters ◽

Energy Distribution Functions

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Time evolution of electron energy distribution function and plasma parameters in pulsed and unbalanced magnetron argon discharge

Journal of Applied Physics ◽

10.1063/1.1990264 ◽

2005 ◽

Vol 98 (4) ◽

pp. 043301 ◽

Cited By ~ 5

Author(s):

Sang-Hun Seo ◽

Jung-Hwan In ◽

Hong-Young Chang ◽

Jeon-Geon Han

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Time Evolution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Plasma Parameters ◽

Unbalanced Magnetron ◽

Argon Discharge

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Radial behaviour of the electron energy distribution function in the cylindrical magnetron discharge in argon

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/32/20/312 ◽

1999 ◽

Vol 32 (20) ◽

pp. 2655-2665 ◽

Cited By ~ 22

Author(s):

E Passoth ◽

J F Behnke ◽

C Csambal ◽

M Tichý ◽

P Kudrna ◽

...

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Magnetron Discharge ◽

Cylindrical Magnetron ◽

Radial Behaviour

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Modulation of electron energy distribution functions and plasma parameters in a dual-frequency cylindrical ICP source

Plasma Research Express ◽

10.1088/2516-1067/aaf24d ◽

2018 ◽

Vol 1 (1) ◽

pp. 015008 ◽

Cited By ~ 2

Author(s):

Yue Hua ◽

Jian Song ◽

Zeyu Hao ◽

Gailing Zhang ◽

Chunsheng Ren

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Dual Frequency ◽

Plasma Parameters ◽

Energy Distribution Functions

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Spatiotemporal evolution of electron energy distribution and plasma parameters in short-pulse magnetron discharges

The 33rd IEEE International Conference on Plasma Science, 2006. ICOPS 2006. IEEE Conference Record - Abstracts. ◽

10.1109/plasma.2006.1706978 ◽

2006 ◽

Author(s):

Sang-Hun Seo ◽

Jung-Hwan In ◽

Hong-Young Chang

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Short Pulse ◽

Electron Energy Distribution ◽

Spatiotemporal Evolution ◽

Plasma Parameters ◽

Pulse Magnetron

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On the effect of the electron energy distribution on the plasma parameters of an argon discharge: a global (volume-averaged) model study

Plasma Sources Science and Technology ◽

10.1088/0963-0252/10/1/310 ◽

2001 ◽

Vol 10 (1) ◽

pp. 76-81 ◽

Cited By ~ 125

Author(s):

J T Gudmundsson

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution ◽

Plasma Parameters ◽

Model Study ◽

Argon Discharge ◽

Averaged Model

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Temporal evolution of electron energy distribution function and plasma parameters in the afterglow of drifting magnetron plasma

Plasma Sources Science and Technology ◽

10.1088/0963-0252/14/3/021 ◽

2005 ◽

Vol 14 (3) ◽

pp. 576-580 ◽

Cited By ~ 9

Author(s):

Sang-Hun Seo ◽

Jung-Hwan In ◽

Hong-Young Chang

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Temporal Evolution ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Plasma Parameters

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