Impact of deposition parameters on the characterizations of highly orientated aluminum nitride for film bulk acoustic wave resonator device

2005 ◽  
Author(s):  
Jiang Ning ◽  
R.K. Sharma ◽  
Feng Hanhua ◽  
Wang Zhe ◽  
S. Xu
Keyword(s):  
Acoustic Wave ◽  
Aluminum Nitride ◽  
Bulk Acoustic Wave ◽  
Bulk Acoustic Wave Resonator ◽  
Deposition Parameters ◽  
Wave Resonator ◽  
Film Bulk

Piezoelectric Properties of Aluminum Nitride for Thin Film Bulk Acoustic Wave Resonator

2005 ◽  
Vol 47 (92) ◽  
pp. 309 ◽  
Author(s):  
Nam Kuangwoo ◽  
Park Yunkwon ◽  
Ha Byeoungju ◽  
Shim Dongha ◽  
Song Insang ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Aluminum Nitride ◽  
Piezoelectric Properties ◽  
Bulk Acoustic Wave ◽  
Bulk Acoustic Wave Resonator ◽  
Wave Resonator ◽  
Film Bulk

scholarly journals The thin film bulk acoustic wave resonator based on single-crystalline 43○Y-cut lithium niobate thin films

AIP Advances ◽  
2020 ◽  
Vol 10 (7) ◽  
pp. 075002
Author(s):  
Xiaoyuan Bai ◽  
Yao Shuai ◽  
Lu Lv ◽  
Ying Xing ◽  
Jiaoling Zhao ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Lithium Niobate ◽  
Acoustic Wave ◽  
Bulk Acoustic Wave ◽  
Single Crystalline ◽  
Bulk Acoustic Wave Resonator ◽  
Wave Resonator ◽  
Film Bulk

Simulation and fabrication of thin film bulk acoustic wave resonator

2016 ◽  
Vol 37 (7) ◽  
pp. 074009
Author(s):  
Xixi Han ◽  
Yi Ou ◽  
Zhigang Li ◽  
Wen Ou ◽  
Dapeng Chen ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Bulk Acoustic Wave ◽  
Bulk Acoustic Wave Resonator ◽  
Wave Resonator ◽  
Film Bulk

Thin film bulk acoustic wave resonator (TFBAR) gas sensor

2005 ◽  
Author(s):  
M. Benetti ◽  
D. Cannat ◽  
A. D'Amico ◽  
F. Di Pietrantonio ◽  
V. Foglietti ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Gas Sensor ◽  
Bulk Acoustic Wave ◽  
Bulk Acoustic Wave Resonator ◽  
Wave Resonator ◽  
Film Bulk

scholarly journals Extraction of lateral eigenmode properties in thin film bulk acoustic wave resonator from interferometric measurements

2010 ◽  
Vol 96 (17) ◽  
pp. 173502 ◽  
Author(s):  
Kimmo Kokkonen ◽  
Tuomas Pensala ◽  
Johanna Meltaus ◽  
Matti Kaivola
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Bulk Acoustic Wave ◽  
Bulk Acoustic Wave Resonator ◽  
Wave Resonator ◽  
Film Bulk
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