Fabrication of three-dimensional polymer photonic crystal by a single beam laser holographic lithography

2005 ◽  
Author(s):  
Lijun Wu ◽  
Yongchun Zhong ◽  
Che Ting Chan ◽  
Kam Sing Wong ◽  
Guoping Wang
Keyword(s):  
Photonic Crystal ◽  
Three Dimensional ◽  
Holographic Lithography ◽  
Single Beam ◽  
Beam Laser

scholarly journals Fabrication of two-layer integrated phase mask for single-beam and single-exposure fabrication of three-dimensional photonic crystal

2008 ◽  
Vol 16 (12) ◽  
pp. 9165 ◽  
Author(s):  
Yuankun Lin ◽  
Ahmad Harb ◽  
Daniel Rodriguez ◽  
Karen Lozano ◽  
Di Xu ◽  
...  
Keyword(s):  
Photonic Crystal ◽  
Three Dimensional ◽  
Phase Mask ◽  
Single Exposure ◽  
Single Beam ◽  
Dimensional Photonic Crystal

Two-photon fabrication of photonic crystals by single-beam laser holographic lithography

2010 ◽  
Vol 107 (7) ◽  
pp. 074311 ◽  
Author(s):  
Yongchun Zhong ◽  
Jianying Zhou ◽  
Kam Sing Wong
Keyword(s):  
Photonic Crystals ◽  
Holographic Lithography ◽  
Single Beam ◽  
Two Photon ◽  
Beam Laser

Fabrication of two-layer integrated phase mask and single-beam, single exposure fabrication of 3D photonic crystal template using the mask

2008 ◽  
Author(s):  
Yuankun Lin ◽  
Ahmad Harb ◽  
Daniel Rodriguez ◽  
Karen Lozano ◽  
Di Xu ◽  
...  
Keyword(s):  
Photonic Crystal ◽  
Phase Mask ◽  
Single Exposure ◽  
Single Beam

Fabrication of Three-Dimensional Micro-Structures with Two-Photon Absorption by Femtosecond Laser

2006 ◽  
Vol 532-533 ◽  
pp. 568-571
Author(s):  
Ming Zhou ◽  
Hai Feng Yang ◽  
Li Peng Liu ◽  
Lan Cai
Keyword(s):  
Photonic Crystal ◽  
Femtosecond Laser ◽  
Detection System ◽  
Three Dimensional ◽  
Photon Absorption ◽  
Micro Fabrication ◽  
Two Photon Absorption ◽  
Two Photon ◽  
Photo Polymerization ◽  
System A

The photo-polymerization induced by Two-Photon Absorption (TPA) is tightly confined in the focus because the efficiency of TPA is proportional to the square of intensity. Three-dimensional (3D) micro-fabrication can be achieved by controlling the movement of the focus. Based on this theory, a system for 3D-micro-fabrication with femtosecond laser is proposed. The system consists of a laser system, a microscope system, a real-time detection system and a 3D-movement system, etc. The precision of micro-machining reaches a level down to 700nm linewidth. The line width was inversely proportional to the fabrication speed, but proportional to laser power and NA. The experiment results were simulated, beam waist of 0.413μm and TPA cross section of 2×10-54cm4s was obtained. While we tried to optimize parameters, we also did some research about its applications. With TPA photo-polymerization by means of our experimental system, 3D photonic crystal of wood-pile structure twelve layers and photonic crystal fiber are manufactured. These results proved that the micro-fabrication system of TPA can not only obtain the resolution down to sub-micron level, but also realize real 3D micro-fabrication.

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