Electron and atomic force microscopy studies of femtosecond laser machining of Si, GaAs and InP
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2018 ◽
Vol 44
(14)
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pp. 58
2008 ◽
2009 ◽
Vol 267
(23-24)
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pp. 3606-3610
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2010 ◽
Vol 48
(5)
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pp. 616-625
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2011 ◽
Vol 108
(5)
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pp. 1777-1782
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