A batch study of trace metal impurities in high-k semiconductor precursors CFM: Contamination free manufacturing

2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ◽

10.1109/asmc.2017.7969201 ◽

2017 ◽

Author(s):

Vijay Chowdhury ◽

Mohsina Islam ◽

Shi Liu

Keyword(s):

Trace Metal ◽

Metal Impurities ◽

High K ◽

Batch Study ◽

Semiconductor Precursors

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A batch study of trace metal impurities in high-k semiconductor precursors

2017 40th International Convention on Information and Communication Technology, Electronics and Microelectronics (MIPRO) ◽

10.23919/mipro.2017.7966548 ◽

2017 ◽

Author(s):

Vijay Chowdhury ◽

Mohsina Islam ◽

Shi Liu

Keyword(s):

Trace Metal ◽

Metal Impurities ◽

High K ◽

Batch Study ◽

Semiconductor Precursors

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Selective Precipitation Separation and Inductively Coupled Plasma Mass Spectrometric Determination of Trace Metal Impurities in High Purity Silver

The Analyst ◽

10.1039/a700139h ◽

1997 ◽

Vol 122 (5) ◽

pp. 437 ◽

Cited By ~ 9

Author(s):

Yuh-Chang Sun ◽

Jerzy Mierzwa ◽

Chien-Feng Lin ◽

T. I. Yeh ◽

Mo-Hsiung Yang

Keyword(s):

Trace Metal ◽

High Purity ◽

Inductively Coupled Plasma ◽

Mass Spectrometric ◽

Selective Precipitation ◽

Inductively Coupled ◽

Mass Spectrometric Determination ◽

Metal Impurities

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The effect of some trace metal impurities on the electrowinning of zinc from Kidd Creek electrolyte

Hydrometallurgy ◽

10.1016/0304-386x(92)90025-u ◽

1992 ◽

Vol 29 (1-3) ◽

pp. 413-430 ◽

Cited By ~ 10

Author(s):

R.M. Morrison ◽

D.J. MacKinnon ◽

D.A. Uceda ◽

P.E. Warren ◽

J.E. Mouland

Keyword(s):

Trace Metal ◽

Metal Impurities

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Flame AAS determination of dopants and trace metal impurities in single crystals of potassium titanylphosphate

Talanta ◽

10.1016/0039-9140(95)01570-2 ◽

1995 ◽

Vol 42 (9) ◽

pp. 1259-1263 ◽

Cited By ~ 9

Author(s):

E Ivanova

Keyword(s):

Trace Metal ◽

Single Crystals ◽

Metal Impurities

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Separation of trace metal impurities from nuclear grade uranium by long-chain amine extraction and direct determination by atomic absorption spectrophotometry

Analytical Chemistry ◽

10.1021/ac60348a028 ◽

1974 ◽

Vol 46 (12) ◽

pp. 1812-1814 ◽

Cited By ~ 14

Author(s):

Sergio. De Moraes ◽

Alcidio. Abrao

Keyword(s):

Trace Metal ◽

Atomic Absorption ◽

Direct Determination ◽

Atomic Absorption Spectrophotometry ◽

Nuclear Grade ◽

Absorption Spectrophotometry ◽

Metal Impurities ◽

Nuclear Grade Uranium ◽

Long Chain

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SEPARATION AND DETERMINATION OF TRACE METAL IMPURITIES IN RARE-EARTH- OXIDES. (Thesis)

10.2172/4520361 ◽

1966 ◽

Author(s):

R Hansen

Keyword(s):

Rare Earth ◽

Trace Metal ◽

Rare Earth Oxides ◽

Metal Impurities

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Limitations of Analysis of Metal Impurities Analysis in High-k Film

2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ◽

10.1109/asmc.2007.375114 ◽

2007 ◽

Author(s):

Ya-Ling Po ◽

Carol Lin ◽

Shian-Shio Chen ◽

Tings Wang

Keyword(s):

Metal Impurities ◽

High K

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Influences of trace metal impurities on the thermal quenching of photoluminescence in hydrogenated amorphous silicon by homogeneous chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.103137 ◽

1990 ◽

Vol 56 (16) ◽

pp. 1591-1593 ◽

Cited By ~ 2

Author(s):

Z. M. Qian ◽

J. Nijs ◽

H. Michiel ◽

J. Leclair ◽

W. Vandervorst ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Trace Metal ◽

Amorphous Silicon ◽

Vapor Deposition ◽

Hydrogenated Amorphous Silicon ◽

Thermal Quenching ◽

Chemical Vapor ◽

Metal Impurities ◽

Homogeneous Chemical ◽

Hydrogenated Amorphous

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Trace metal impurities determination in high-purity polyimide by plasma-based techniques

Microchemical Journal ◽

10.1016/j.microc.2019.01.039 ◽

2019 ◽

Vol 146 ◽

pp. 492-497 ◽

Cited By ~ 2

Author(s):

Rafael F. Santos ◽

Sandra M. Cruz ◽

Sindy R. Krzyzaniak ◽

Fabio A. Duarte ◽

Paola A. Mello ◽

...

Keyword(s):

Trace Metal ◽

High Purity ◽

Metal Impurities

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Trace metal impurities in catalysis

Chemical Society Reviews ◽

10.1039/c2cs15249e ◽

2012 ◽

Vol 41 (3) ◽

pp. 979 ◽

Cited By ~ 146

Author(s):

Isabelle Thomé ◽

Anne Nijs ◽

Carsten Bolm

Keyword(s):

Trace Metal ◽

Metal Impurities

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