Low-Temperature Deposition of Silicon Dioxide and Silicon Nitride for Dual Spacer Application

2007 ◽  
Author(s):  
Hood Chatham ◽  
Martin Mogaard ◽  
Helmuth Treichel
Keyword(s):  
Silicon Nitride ◽  
Low Temperature ◽  
Silicon Dioxide ◽  
Low Temperature Deposition ◽  
Temperature Deposition

Low Temperature Deposition of Silicon Nitride by Reactive Ion‐Beam Sputtering

1983 ◽  
Vol 130 (3) ◽  
pp. 638-644 ◽  
Author(s):  
D. Bouchier ◽  
G. Gautherin ◽  
C. Schwebel ◽  
A. Bosseboeuf ◽  
B. Agius ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Low Temperature ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Low Temperature Deposition ◽  
Beam Sputtering ◽  
Temperature Deposition

Low-Temperature Deposition of Silicon Nitride Films Using Ultraviolet-Irradiated Ammonia

2019 ◽  
Vol 8 (11) ◽  
pp. P715-P718
Author(s):  
Yoshinobu Shiba ◽  
Akinobu Teramoto ◽  
Tomoyuki Suwa ◽  
Katsutoshi Ishii ◽  
Akira Shimizu ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Low Temperature ◽  
Silicon Nitride Films ◽  
Low Temperature Deposition ◽  
Temperature Deposition

scholarly journals High‐rate, low‐temperature deposition of multifunctional nano‐crystalline silicon nitride films

2010 ◽  
Vol 11 (3) ◽  
pp. 109-112
Author(s):  
Jae‐Dam Hwang ◽  
Kyoung‐Min Lee ◽  
Ki‐Su Keum ◽  
Youn‐Jin Lee ◽  
Wan‐Shick Hong
Keyword(s):  
Silicon Nitride ◽  
Low Temperature ◽  
Crystalline Silicon ◽  
High Rate ◽  
Silicon Nitride Films ◽  
Low Temperature Deposition ◽  
Nano Crystalline ◽  
Temperature Deposition
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