Low Temperature Deposition of Silicon Nitride by Reactive Ion‐Beam Sputtering

1983 ◽  
Vol 130 (3) ◽  
pp. 638-644 ◽  
Author(s):  
D. Bouchier ◽  
G. Gautherin ◽  
C. Schwebel ◽  
A. Bosseboeuf ◽  
B. Agius ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Low Temperature ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Low Temperature Deposition ◽  
Beam Sputtering ◽  
Temperature Deposition

Low temperature deposition of ITO thin films by ion beam sputtering

2000 ◽  
Vol 377-378 ◽  
pp. 81-86 ◽  
Author(s):  
Donghwan Kim ◽  
Younggun Han ◽  
Jun-Sik Cho ◽  
Seok-Keun Koh
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Low Temperature Deposition ◽  
Beam Sputtering ◽  
Ito Thin Films ◽  
Temperature Deposition

Low temperature growth of Bi2(Sr,Ca)2CuOx thin films by ion beam sputtering and effects of oxygen plasma

1999 ◽  
Vol 325 (1-2) ◽  
pp. 91-107 ◽  
Author(s):  
Tamio Endo ◽  
Satoshi Yamada ◽  
Naoki Hirate ◽  
Munehiro Horie ◽  
Katsutoshi Itoh ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Oxygen Plasma ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Beam Sputtering

Low-Temperature Preparation of Pb(Zr, Ti)O3Thin Films on (Pb, La)TiO3Buffer Layer by Multi-Ion-Beam Sputtering

1993 ◽  
Vol 32 (Part 1, No. 9B) ◽  
pp. 4057-4060 ◽  
Author(s):  
Isaku Kanno ◽  
Shigenori Hayashi ◽  
Takeshi Kamada ◽  
Masatoshi Kitagawa ◽  
Takashi Hirao
Keyword(s):  
Low Temperature ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Low Temperature Preparation ◽  
Beam Sputtering ◽  
Temperature Preparation
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