High frequency characteristics of Cu/Ta/hydrogen silsesquioxane (HSQ) system and the effects of NH3 plasma treatment on the electrical properties for hydrogen silsesquioxane

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Author(s):  
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Bi-Shiou Chiou
Keyword(s):  
Electrical Properties ◽  
Plasma Treatment ◽  
High Frequency ◽  
Frequency Characteristics ◽  
Hydrogen Silsesquioxane

Improvement on Intrinsic Electrical Properties of Low-k Hydrogen Silsesquioxane/Copper Interconnects Employing Deuterium Plasma Treatment

2000 ◽  
Vol 147 (3) ◽  
pp. 1186 ◽  
Author(s):  
Po-Tsun Liu ◽  
Ting-Chang Chang ◽  
Ya-Liang Yang ◽  
Yi-Fang Cheng ◽  
Jae-Kyun Lee ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Plasma Treatment ◽  
Copper Interconnects ◽  
Deuterium Plasma ◽  
Hydrogen Silsesquioxane ◽  
Low K

High Frequency Characteristics and Electrical Properties of Multilayer FeCoHfO/AlO_x Films

PIERS Online ◽  
2010 ◽  
Vol 6 (4) ◽  
pp. 318-321 ◽  
Author(s):  
Yu Ming Kuo ◽  
Shandong Li ◽  
Jenq-Gong Duh ◽  
Su-Yueh Tsai
Keyword(s):  
Electrical Properties ◽  
High Frequency ◽  
Frequency Characteristics

Analysis of High Frequency Characteristics for a Meander Line Slow-wave Structure

2020 ◽  
Author(s):  
Zheng Wen ◽  
Jirun Luo ◽  
Yu Fan ◽  
Chen Yang ◽  
Fang Zhu ◽  
...  
Keyword(s):  
Slow Wave ◽  
High Frequency ◽  
Wave Structure ◽  
Slow Wave Structure ◽  
Frequency Characteristics ◽  
Meander Line

scholarly journals High frequency characteristics of a magnetically insulated transmission line oscillator oscillating in HEM11 mode

2008 ◽  
Vol 57 (8) ◽  
pp. 4875
Author(s):  
Wang Dong ◽  
Chen Dai-Bing ◽  
Fan Zhi-Kai ◽  
Deng Jing-Kang
Keyword(s):  
Transmission Line ◽  
High Frequency ◽  
Frequency Characteristics
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