Effects of plasma treatment on the high frequency characteristics of Cu/Ta/hydrogen silsesquioxane (HSQ) system and electrical behaviors of Cu/Ta/HSQ/Pt MIM capacitors
2007 ◽
Vol 84
(4)
◽
pp. 646-652
◽
Keyword(s):
1994 ◽
Vol 15
(2)
◽
pp. 130-144
◽
Keyword(s):
2015 ◽
Vol 466-467
◽
pp. 26-30
◽
2007 ◽
Vol 42
(3)
◽
pp. 941-947
◽
Keyword(s):