Composite filter design and application to piezo-driven stage systems

Author(s):  
Daisuke Noda ◽  
Kenta Seki ◽  
Makoto Iwasaki
1997 ◽  
Vol 23 (5) ◽  
pp. 283-299 ◽  
Author(s):  
Farid Ahmed ◽  
Mohammad A. Karim

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