Composite filter design and application to piezo-driven stage systems
2016 ◽
Vol 63
(1)
◽
pp. 359-370
◽
Keyword(s):
2009 ◽
Vol 40
(11)
◽
pp. 1632-1641
◽
Keyword(s):
1997 ◽
Vol 23
(5)
◽
pp. 283-299
◽
2015 ◽
pp. dnv051
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