On intermittent-contact mode sensing using electrostatically-actuated micro-cantilevers with integrated thermal sensors
Keyword(s):
Keyword(s):
2008 ◽
Vol 48
(8-9)
◽
pp. 1339-1342
◽
Keyword(s):
2020 ◽
Vol 11
◽
pp. 453-465
◽
Keyword(s):
Keyword(s):