High-cycle fatigue of single-crystal silicon thin films
2001 ◽
Vol 10
(4)
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pp. 593-600
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Keyword(s):
2002 ◽
Vol 11
(1)
◽
pp. 91-91
Keyword(s):
2007 ◽
Vol 140
(2)
◽
pp. 257-265
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Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):
High-Cycle Fatigue Tests of Micro/Nano-Scale Single Crystal Silicon for Reliable Design of MEMS/NEMS
2004 ◽
Vol 2004.1
(0)
◽
pp. 369-370
Keyword(s):
2007 ◽
Vol 30
(12)
◽
pp. 1172-1181
◽
Keyword(s):
Keyword(s):
2005 ◽