Low-cost combustion chemical vapor deposition of epitaxial buffer layers and superconductors

1999 ◽  
Vol 9 (2) ◽  
pp. 2426-2429 ◽  
Author(s):  
S.S. Shoup ◽  
S. Shanmugham ◽  
D. Cousins ◽  
A.T. Hunt ◽  
M. Paranthaman ◽  
...  
2001 ◽  
Vol 689 ◽  
Author(s):  
Shara S. Shoup ◽  
Marvis K. White ◽  
Steve L. Krebs ◽  
Natalie Darnell ◽  
Adam C. King ◽  
...  

ABSTRACTThe innovative Combustion Chemical Vapor Deposition (CCVD) process is a non-vacuum technique that is being investigated to enable next generation products in several application areas including high-temperature superconductors (HTS). In combination with the Rolling Assisted Biaxially Textured Substrate (RABiTS) technology, the CCVD process has significant promise to provide low-cost, high-quality lengths of YBCO coated conductor. The CCVD technology has been used to deposit both buffer layer coatings as well as YBCO superconducting layers. A buffer layer architecture of strontium titanate and ceria have been deposited by CCVD on textured nickel substrates and optimized to appropriate thicknesses and microstructures to provide templates for growing PLD YBCO with high critical current density values. The CCVD buffer layers have been scaled to meter plus lengths with good epitaxial uniformity along the length. A short sample cut from one of the lengths enabled high critical current density PLD YBCO. Films of CCVD YBCO superconductors have been grown on single crystal substrates with critical current densities over 1 MA/cm2. Work is currently in progress to combine both the buffer layer and superconductor technologies to produce high-quality coupons of HTS tape made entirely by the non-vacuum CCVD process.


CrystEngComm ◽  
2020 ◽  
Vol 22 (1) ◽  
pp. 130-141
Author(s):  
Prerna Chauhan ◽  
S. Hasenöhrl ◽  
Ľ. Vančo ◽  
P. Šiffalovič ◽  
E. Dobročka ◽  
...  

Thick InAlN layers (In-molar fraction >0.37) on GaN buffer layers were prepared using a close-coupled showerhead metalorganic chemical vapor deposition (MOCVD) reactor.


2020 ◽  
pp. 2001482 ◽  
Author(s):  
Taeyong Eom ◽  
Songhee Kim ◽  
Raphael E. Agbenyeke ◽  
Hyunmin Jung ◽  
Seon Min Shin ◽  
...  

1998 ◽  
Vol 533 ◽  
Author(s):  
Carsten Rosenblad ◽  
Thomas Graf ◽  
Alex Dommann ◽  
Hans Von känel

AbstractWe discuss a new method for plasma enhanced chemical vapor deposition, applied to the epitaxial growth of Si and of Si-Ge heterostructures. Growth rates up to 5 nm/s become possible at substrate temperatures below 600°C, by utilizing very intense but low energy plasmas to crack the reactive gases, SiH4 and GeH4, and to speed up the surface kinetics. The method is applied to the synthesis of step-graded Si-Ge buffer layers, exhibiting the well known cross-hatched surface morphology.


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