A CVD epitaxial deposition in a vertical barrel reactor: process modeling using cluster-based fuzzy logic models
1998 ◽
Vol 11
(4)
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pp. 645-653
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1995 ◽
Vol 142
(9)
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pp. 3123-3132
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2016 ◽
Vol 98
(2)
◽
pp. 197-201
2012 ◽
Vol 440
◽
pp. 123-131
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