A CVD epitaxial deposition in a vertical barrel reactor: process modeling using cluster-based fuzzy logic models

1998 ◽  
Vol 11 (4) ◽  
pp. 645-653 ◽  
Author(s):  
J.C. Chiou ◽  
J.Y. Yang
Informatica ◽  
2018 ◽  
Vol 29 (1) ◽  
pp. 1-20 ◽  
Author(s):  
Javier Albadán ◽  
Paulo Gaona ◽  
Carlos Montenegro ◽  
Rubén González-Crespo ◽  
Enrique Herrera-Viedma

Author(s):  
Luigi Benedicenti ◽  
Giancarlo Succi ◽  
Tulio Vernazza ◽  
Andrea Valerio

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