CVD Epitaxial Deposition in a Vertical Barrel Reactor: Process Modeling and Optimization Using Neural Network Models
1995 ◽
Vol 142
(9)
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pp. 3123-3132
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2020 ◽
Vol 5
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pp. 140-147
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Keyword(s):
2021 ◽
Vol 1074
(1)
◽
pp. 012025