A cylindrical micro ultrasonic motor using PZT thin film deposited by single process hydrothermal method (/spl phi/2.4 mm, L=10 mm stator transducer)

1998 ◽  
Vol 45 (5) ◽  
pp. 1178-1187 ◽  
Author(s):  
T. Morita ◽  
M. Kuribayashi Kurosawa ◽  
T. Higuchi
Keyword(s):  
Thin Film ◽  
Hydrothermal Method ◽  
Ultrasonic Motor ◽  
Pzt Thin Film ◽  
Single Process

Single Process to Deposit Lead Zirconate Titanate (PZT) Thin Film by a Hydrothermal Method

1997 ◽  
Vol 36 (Part 1, No. 5B) ◽  
pp. 2998-2999 ◽  
Author(s):  
Takeshi Morita ◽  
Takefumi Kanda ◽  
Yutaka Yamagata ◽  
Minoru Kurosawa ◽  
Toshiro Higuchi
Keyword(s):  
Thin Film ◽  
Hydrothermal Method ◽  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Zirconate Titanate ◽  
Pzt Thin Film ◽  
Single Process

Microtouch-Sensor Array Fabricated by Hydrothermal Method

2002 ◽  
Vol 14 (6) ◽  
pp. 633-639
Author(s):  
Guiryong Kwon ◽  
◽  
Fumihito Arai ◽  
Toshio Fukuda ◽  
Kouichi ltoigawa ◽  
...  
Keyword(s):  
Thin Film ◽  
High Temperature ◽  
Resonance Frequency ◽  
Hydrothermal Method ◽  
Sensor Array ◽  
Impedance Change ◽  
Touch Sensor ◽  
Pzt Thin Film ◽  
Before And After ◽  
Basic Features

We propose a microtouch-sensor array applicable in high-temperature environments. PZT thin film was fabricated on a Ti substrate by a hydrothermal method and electrodes were deposited on it to form the sensor and actuator. The actuator is driven at a resonance frequency of 1.045 [kHz] and actuating voltage is low at ±5[V]. The sensor detects impedance change before and after contact. The sensor is simple and easy to miniaturize and works at temperature up to 82°C. This sensor can be used as an automobile control touch-sensor pad instead of conventional capacitive touch pads because it is robust against high temperature. We detail the sensor's basic features.

scholarly journals Ferroelectric property of an epitaxial lead zirconate titanate thin film deposited by a hydrothermal method

2004 ◽  
Vol 19 (6) ◽  
pp. 1862-1868 ◽  
Author(s):  
Takeshi Morita ◽  
Yasuo Wagatsuma ◽  
Hitoshi Morioka ◽  
Hiroshi Funakubo ◽  
Nava Setter ◽  
...  
Keyword(s):  
Thin Film ◽  
Hydrothermal Method ◽  
Lead Zirconate Titanate ◽  
Thin Film Deposition ◽  
Lead Zirconate ◽  
Film Deposition ◽  
Dimensional Structure ◽  
Zirconate Titanate ◽  
Pzt Thin Film ◽  
Poling Direction

Deposition of thin films via hydrothermal method has various advantages: low deposition temperature, high purity, deposition on a three-dimensional structure,and a large thickness. Although an epitaxial lead zirconate titanate (PZT) thin-film deposition has been reported, the ferroelectric measurement has not been conducted due to the peel-off morphology of the film. The current paper investigates the improvement of an epitaxial PZT thin film deposited via a hydrothermal method. By adjusting the position at which the substrate was suspended in the solution, smooth morphology surface was successfully obtained. As a bottom electrode, a 200-nm SrRuO3 thin film was deposited on SrTiO3 single crystals, and the PZT thin film was deposited on SrRuO3. The remanent polarization 2Pr and coercive electric field for PZT on SrRuO3/SrTiO3 (001) were 17.1 μC/cm2 and 36 kV/cm, respectively, and those of PZT on SrRuO3/SrTiO3 (111) were 32.7 μC/cm2 and 59 kV/cm, respectively. The reason for large imprint electrical field, 91 kV/cm and 40 kV/cm for each film, was unclear at this stage, although it is associated with self–alignment poling direction. This self–alignment poling direction was confirmed via scanning nonlinear dielectric microscopy and is thought to have been related to the deposition mechanisms.

scholarly journals Ferroelectric property of an epitaxial lead zirconate titanate thin film deposited by a hydrothermal method

2003 ◽  
Vol 784 ◽  
Author(s):  
Takeshi Morita ◽  
Yasuo Wagatsuma ◽  
Yasuo Cho ◽  
Hitoshi Morioka ◽  
Hiroshi Funakubo ◽  
...  
Keyword(s):  
Thin Film ◽  
Hydrothermal Method ◽  
Lead Zirconate Titanate ◽  
Three Dimensional ◽  
Thin Film Deposition ◽  
Lead Zirconate ◽  
Film Deposition ◽  
Dimensional Structure ◽  
Pzt Thin Film ◽  
Poling Direction

ABSTRACTHydrothermal method has various advantages; low deposition temperature, high-purity, deposition on a three-dimensional structure and a large thickness. Although epitaxial PZT thin film deposition has reported, ferroelectric measurement has not been conducted due to the peel-off morphology of the film. The present paper investigates the improvement of an epitaxial PZT thin film deposited via a hydrothermal method. By adjusting the position at which the substrate was suspended in the solution, smooth morphology surface was successfully obtained. As a bottom electrode, 200 nm SrRuO3 thin film was deposited on SrTiO3 single crystals, and the PZT thin was deposited on SrRuO3. The remanent polarization 2Pr for PZT on SrRuO3/SrTiO3 (001) was 19.5 μC/cm2 and that of PZT on SrRuO3/SrTiO3 (111) was 37.2 μC/cm2 respectively. The self alignment poling direction was confirmed via scanning nonlinear dielectric microscopy and is thought to have been related to the deposition mechanisms.

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