Microtouch-Sensor Array Fabricated by Hydrothermal Method

2002 ◽  
Vol 14 (6) ◽  
pp. 633-639
Author(s):  
Guiryong Kwon ◽  
◽  
Fumihito Arai ◽  
Toshio Fukuda ◽  
Kouichi ltoigawa ◽  
...  
Keyword(s):  
Thin Film ◽  
High Temperature ◽  
Resonance Frequency ◽  
Hydrothermal Method ◽  
Sensor Array ◽  
Impedance Change ◽  
Touch Sensor ◽  
Pzt Thin Film ◽  
Before And After ◽  
Basic Features

We propose a microtouch-sensor array applicable in high-temperature environments. PZT thin film was fabricated on a Ti substrate by a hydrothermal method and electrodes were deposited on it to form the sensor and actuator. The actuator is driven at a resonance frequency of 1.045 [kHz] and actuating voltage is low at ±5[V]. The sensor detects impedance change before and after contact. The sensor is simple and easy to miniaturize and works at temperature up to 82°C. This sensor can be used as an automobile control touch-sensor pad instead of conventional capacitive touch pads because it is robust against high temperature. We detail the sensor's basic features.

Voice-supported Active Touch Panel Using Micro Touch Sensor with PZT Thin Film

2003 ◽  
Vol 15 (4) ◽  
pp. 384-390
Author(s):  
Gui Ryong Kwon ◽  
◽  
Fumihito Arai ◽  
Toshio Fukuda ◽  
Koichi Itoigawa ◽  
...  
Keyword(s):  
Thin Film ◽  
Active Touch ◽  
Online Information ◽  
Navigation Systems ◽  
Touch Panel ◽  
Thin Film Sensors ◽  
Touch Sensor ◽  
Pzt Thin Film ◽  
The Many ◽  
The Voice

Today's automobiles serve not only as vehicles but also as mobile offices combining communication tools such as cellphones and car navigation systems providing online information services. The many switches are conventionally distributed on the dashboard. A move is under way, however, to combine them into a multifunctional touch panel. We propose a voice-supported active touch panel. Since information feedback to the operator is important in ensuring correct function selection, the panel we designed combines a vibrator and voice explanation. Touch sensors use PZT thin film sensors. The voice explanation uses a quick response system. This paper reports the features and configuration of the voice-supported active touch panel.

Fabrication and Characterization of a PZT thin Film Actuator for a Micro Electromechanical Switch Application

2001 ◽  
Vol 688 ◽  
Author(s):  
Marcus Hoffmann ◽  
Timm Leuerer ◽  
Clemens Krüger ◽  
Ulrich Böttger ◽  
Wilfried Mokwa ◽  
...  
Keyword(s):  
Thin Film ◽  
Resonance Frequency ◽  
Laser Interferometry ◽  
Element Analysis ◽  
Pzt Thin Film ◽  
Finite Element Analysis Simulation ◽  
Cantilever Length ◽  
Silicon Bulk ◽  
Silicon Cantilever ◽  
Converse Piezoelectric Effect

AbstractMicromachined silicon cantilever beams actuated by the converse piezoelectric effect are of great interest for actuator applications, e.g. micro relays or micro mirrors. For the miniaturization and cost saving aspects the combination of silicon bulk micromachining and chemical solution deposition (CSD) technique for the ceramic thin films is very promising.This paper presents the results of such a fabrication process for a PbZr0.45Ti0.55O3 (PZT) thin film micro actuator for a switch application. The actuator was designed with lengths of 190-990 μm, widths of 60-120 μm, and a complete thickness of 1.5 μm. Wherein the piezoelectric PZT function layer has a thickness of 350 nm. For a distance of 10 μm between the switch contacts and an applied voltage of 10 V a finite element analysis simulation (FEA) was carried out to obtain the principal stress contribution, the optimum cantilever length, the sensitivity, the resonance frequency and the switch contact force. The bending beams were characterized by laser interferometry, resonance frequency, and force measurements. These characterization results are compared to the FEM analyses and to an analytical approach.

scholarly journals Ferroelectric property of an epitaxial lead zirconate titanate thin film deposited by a hydrothermal method

2004 ◽  
Vol 19 (6) ◽  
pp. 1862-1868 ◽  
Author(s):  
Takeshi Morita ◽  
Yasuo Wagatsuma ◽  
Hitoshi Morioka ◽  
Hiroshi Funakubo ◽  
Nava Setter ◽  
...  
Keyword(s):  
Thin Film ◽  
Hydrothermal Method ◽  
Lead Zirconate Titanate ◽  
Thin Film Deposition ◽  
Lead Zirconate ◽  
Film Deposition ◽  
Dimensional Structure ◽  
Zirconate Titanate ◽  
Pzt Thin Film ◽  
Poling Direction

Deposition of thin films via hydrothermal method has various advantages: low deposition temperature, high purity, deposition on a three-dimensional structure,and a large thickness. Although an epitaxial lead zirconate titanate (PZT) thin-film deposition has been reported, the ferroelectric measurement has not been conducted due to the peel-off morphology of the film. The current paper investigates the improvement of an epitaxial PZT thin film deposited via a hydrothermal method. By adjusting the position at which the substrate was suspended in the solution, smooth morphology surface was successfully obtained. As a bottom electrode, a 200-nm SrRuO3 thin film was deposited on SrTiO3 single crystals, and the PZT thin film was deposited on SrRuO3. The remanent polarization 2Pr and coercive electric field for PZT on SrRuO3/SrTiO3 (001) were 17.1 μC/cm2 and 36 kV/cm, respectively, and those of PZT on SrRuO3/SrTiO3 (111) were 32.7 μC/cm2 and 59 kV/cm, respectively. The reason for large imprint electrical field, 91 kV/cm and 40 kV/cm for each film, was unclear at this stage, although it is associated with self–alignment poling direction. This self–alignment poling direction was confirmed via scanning nonlinear dielectric microscopy and is thought to have been related to the deposition mechanisms.

Sign in / Sign up

Export Citation Format

Share Document