Particle-in-cell/Monte Carlo simulation of a capacitively coupled radio frequency Ar/CF4 discharge: Effect of gas composition

V. Georgieva; A. Bogaerts; R. Gijbels

doi:10.1063/1.1542920

Particle-in-cell/Monte Carlo simulation of a capacitively coupled radio frequency Ar/CF4 discharge: Effect of gas composition

Journal of Applied Physics ◽

10.1063/1.1542920 ◽

2003 ◽

Vol 93 (5) ◽

pp. 2369-2379 ◽

Cited By ~ 56

Author(s):

V. Georgieva ◽

A. Bogaerts ◽

R. Gijbels

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Radio Frequency ◽

Gas Composition ◽

Capacitively Coupled ◽

Particle In Cell

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A particle-in-cell/Monte Carlo simulation of a capacitively coupled chlorine discharge

2014 IEEE 41st International Conference on Plasma Sciences (ICOPS) held with 2014 IEEE International Conference on High-Power Particle Beams (BEAMS) ◽

10.1109/plasma.2014.7012492 ◽

2014 ◽

Author(s):

Shuo Huang ◽

J. T. Gudmundsson

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Capacitively Coupled ◽

Particle In Cell

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Particle-in-cell/Monte Carlo simulation of radio frequency SiH/sub 4//H/sub 2/ discharges

IEEE Transactions on Plasma Science ◽

10.1109/27.799818 ◽

1999 ◽

Vol 27 (5) ◽

pp. 1399-1405 ◽

Cited By ~ 14

Author(s):

M. Yan ◽

W.J. Goedheer

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Radio Frequency ◽

Particle In Cell

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Particle-in-cell/Monte Carlo simulations of a low-pressure capacitively coupled radio-frequency discharge: Effect of adding H2 to an Ar discharge

Journal of Applied Physics ◽

10.1063/1.1563820 ◽

2003 ◽

Vol 93 (9) ◽

pp. 5025-5033 ◽

Cited By ~ 16

Author(s):

E. Neyts ◽

M. Yan ◽

A. Bogaerts ◽

R. Gijbels

Keyword(s):

Monte Carlo ◽

Monte Carlo Simulations ◽

Radio Frequency ◽

Low Pressure ◽

Capacitively Coupled ◽

Particle In Cell ◽

Radio Frequency Discharge

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A particle-in-cell/Monte Carlo simulation of a capacitively coupled chlorine discharge

Plasma Sources Science and Technology ◽

10.1088/0963-0252/22/5/055020 ◽

2013 ◽

Vol 22 (5) ◽

pp. 055020 ◽

Cited By ~ 14

Author(s):

Shuo Huang ◽

J T Gudmundsson

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Capacitively Coupled ◽

Particle In Cell

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Particle-in-Cell/Monte Carlo simulation of CF4 discharge in capacitively coupled plasma reactor

Computer Physics Communications ◽

10.1016/j.cpc.2007.02.011 ◽

2007 ◽

Vol 177 (1-2) ◽

pp. 129-130

Author(s):

Jonghyuk Kang ◽

Ganyoung Park ◽

Jaekoo Lee

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Plasma Reactor ◽

Capacitively Coupled ◽

Particle In Cell ◽

Capacitively Coupled Plasma

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Particle-in-cell Monte Carlo simulation using free path method for radio frequency argon discharge modelling: Comparison with experiment

International Journal of the Physical Sciences ◽

10.5897/ijps10.028 ◽

2012 ◽

Vol 7 (33) ◽

Cited By ~ 1

Author(s):

Djilali Benyoucef

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Radio Frequency ◽

Free Path ◽

Particle In Cell ◽

Comparison With Experiment ◽

Argon Discharge

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On the energy conservation electrostatic particle-in-cell/Monte Carlo simulation: Benchmark and application to the radio frequency discharges

Chinese Physics B ◽

10.1088/1674-1056/23/3/035204 ◽

2014 ◽

Vol 23 (3) ◽

pp. 035204 ◽

Cited By ~ 4

Author(s):

Hong-Yu Wang ◽

Wei Jiang ◽

Peng Sun ◽

Ling-Bao Kong

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Energy Conservation ◽

Radio Frequency ◽

Particle In Cell ◽

Radio Frequency Discharges

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Axisymmetrical particle-in-cell/Monte Carlo simulation of narrow gap planar magnetron plasmas. II. Radio frequency-driven discharge

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1359535 ◽

2001 ◽

Vol 19 (3) ◽

pp. 838-847 ◽

Cited By ~ 12

Author(s):

Shuji Kondo ◽

Kenichi Nanbu

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Radio Frequency ◽

Narrow Gap ◽

Particle In Cell ◽

Planar Magnetron

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Comparison of a one-dimensional particle-in-cell–Monte Carlo model and a one-dimensional fluid model for a CH[sub 4]/H[sub 2] capacitively coupled radio frequency discharge

Journal of Applied Physics ◽

10.1063/1.1461895 ◽

2002 ◽

Vol 91 (10) ◽

pp. 6296 ◽

Cited By ~ 30

Author(s):

Vladimir Ivanov ◽

Olga Proshina ◽

Tatyana Rakhimova ◽

Alexander Rakhimov ◽

Dieter Herrebout ◽

...

Keyword(s):

Monte Carlo ◽

Radio Frequency ◽

Fluid Model ◽

Monte Carlo Model ◽

Capacitively Coupled ◽

One Dimensional ◽

Particle In Cell ◽

Radio Frequency Discharge

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Particle-In-Cell/Monte-Carlo Simulation of Plasma and Neutral Gas Flow for the Inner Coating of PET Bottles by Plasma-Based Ion Implantation. N2 Gas Plasma

Plasma Processes and Polymers ◽

10.1002/ppap.200500008 ◽

2005 ◽

Vol 2 (6) ◽

pp. 480-484 ◽

Cited By ~ 5

Author(s):

Yoshiko Miyagawa ◽

Masaaki Tanaka ◽

Hiroshi Nakadate ◽

Masami Ikeyama ◽

Soji Miyagawa

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Ion Implantation ◽

Gas Flow ◽

Particle In Cell ◽

Pet Bottles ◽

Neutral Gas ◽

Gas Plasma

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