Modeling of low-pressure microwave discharges in Ar, He, and O/sub 2/: similarity laws for the maintenance field and mean power transfer
1991 ◽
Vol 19
(2)
◽
pp. 229-239
◽
1997 ◽
Vol 40
(8)
◽
pp. 663-671
◽
1995 ◽
Vol 74-75
◽
pp. 59-62
◽
2006 ◽
Vol 34
(6)
◽
pp. 2606-2610
◽
2002 ◽
Vol 156
(1-3)
◽
pp. 182-184
◽