Self-consistent modeling of low pressure microwave discharges including non-collisional heating processes
1997 ◽
Vol 40
(8)
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pp. 663-671
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1994 ◽
Vol 66
(6)
◽
pp. 1363-1372
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2016 ◽
Vol 49
(23)
◽
pp. 235207
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2003 ◽
Keyword(s):
1995 ◽
Vol 74-75
◽
pp. 59-62
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2006 ◽
Vol 34
(6)
◽
pp. 2606-2610
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