Hetero-emitter-like characteristics of phosphorus doped polysilicon emitter transistors. Part I: band structure in the polysilicon emitter obtained from electrical measurements

1995 ◽  
Vol 42 (3) ◽  
pp. 419-426 ◽  
Author(s):  
M. Kondo ◽  
T. Kobayashi ◽  
Y. Tamaki
2002 ◽  
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pp. 1032-1034 ◽  
Author(s):  
Tomoyuki Nakamura ◽  
Takashi Suemasu ◽  
Ken-ichiro Takakura ◽  
Fumio Hasegawa ◽  
Akihiro Wakahara ◽  
...  

2017 ◽  
Vol 121 (33) ◽  
pp. 18263-18273 ◽  
Author(s):  
Prashant K Sarswat ◽  
Sayan Sarkar ◽  
Gaosong Yi ◽  
Michael L Free

1993 ◽  
Vol 40 (8) ◽  
pp. 1563-1565 ◽  
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M. Nanba ◽  
T. Uchino ◽  
M. Kondo ◽  
T. Nakamura ◽  
T. Kobayashi ◽  
...  

2009 ◽  
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Howard M. Branz ◽  
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Robert Reedy ◽  
Bobby To ◽  
...  

1989 ◽  
Vol 67 (4) ◽  
pp. 179-183 ◽  
Author(s):  
E. P. Keyes ◽  
N. G. Tarr

The effect of 900 °C furnace annealing on transistors with in situ phosphorus-doped polysilicon emitters has been investigated. For devices with chemically grown interfacial oxides, annealing is essential to give acceptable emitter resistance and emitter Gummel numbers. For devices lacking an intentionally grown interfacial oxide, annealing is necessary to reduce the emitter resistance to a tolerable level, but it simultaneously lowers the emitter Gummel number.


1996 ◽  
Vol 43 (8) ◽  
pp. 1281-1285 ◽  
Author(s):  
T. Shiba ◽  
M. Kondo ◽  
T. Uchino ◽  
H. Murakoshi ◽  
Y. Tamaki

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