Evolution of the optical functions of aluminum films during nucleation and growth determined by real-time spectroscopic ellipsometry

H. V. Nguyen; Ilsin An; R. W. Collins

doi:10.1103/physrevlett.68.994

Evolution of the optical functions of aluminum films during nucleation and growth determined by real-time spectroscopic ellipsometry

Physical Review Letters ◽

10.1103/physrevlett.68.994 ◽

1992 ◽

Vol 68 (7) ◽

pp. 994-997 ◽

Cited By ~ 32

Author(s):

H. V. Nguyen ◽

Ilsin An ◽

R. W. Collins

Keyword(s):

Real Time ◽

Spectroscopic Ellipsometry ◽

Nucleation And Growth ◽

Aluminum Films ◽

Optical Functions

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Real-time spectroscopic ellipsometry for determination of the optical functions of ion-beam-deposited hydrogenated amorphous carbon

Thin Solid Films ◽

10.1016/s0040-6090(05)80046-x ◽

1990 ◽

Vol 193-194 ◽

pp. 361-370 ◽

Cited By ~ 5

Author(s):

Y. Cong ◽

I. An ◽

R.W. Collins ◽

K. Vedam ◽

H.S. Witham ◽

...

Keyword(s):

Real Time ◽

Amorphous Carbon ◽

Spectroscopic Ellipsometry ◽

Ion Beam ◽

Hydrogenated Amorphous Carbon ◽

Optical Functions ◽

Hydrogenated Amorphous

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Analysis of critical points in semiconductor optical functions from in situ and real-time spectroscopic ellipsometry

Thin Solid Films ◽

10.1016/0040-6090(93)90106-y ◽

1993 ◽

Vol 233 (1-2) ◽

pp. 272-275 ◽

Cited By ~ 7

Author(s):

Hien V. Nguyen ◽

R.W. Collins

Keyword(s):

Real Time ◽

Spectroscopic Ellipsometry ◽

Critical Points ◽

Optical Functions

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Real-Time Spectroscopic Ellipsometry Studies of the Nucleation, Growth, and Optical Functions of Thin Films, Part I: Tetrahedrally Bonded Materials

Physics of Thin Films - Optical Characterization of Real Surfaces and Films ◽

10.1016/b978-0-12-533019-0.50007-7 ◽

1994 ◽

pp. 49-125 ◽

Cited By ~ 14

Author(s):

ROBERT W. COLLINS ◽

ILSIN AN ◽

HIEN V. NGUYEN ◽

YOUMING LI ◽

YIWEI LU

Keyword(s):

Thin Films ◽

Real Time ◽

Spectroscopic Ellipsometry ◽

Bonded Materials ◽

Optical Functions ◽

Nucleation Growth ◽

Tetrahedrally Bonded

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Evolution of the optical functions of thin-film aluminum: A real-time spectroscopic ellipsometry study

Physical Review B ◽

10.1103/physrevb.47.3947 ◽

1993 ◽

Vol 47 (7) ◽

pp. 3947-3965 ◽

Cited By ~ 67

Author(s):

Hien V. Nguyen ◽

Ilsin An ◽

R. W. Collins

Keyword(s):

Thin Film ◽

Real Time ◽

Spectroscopic Ellipsometry ◽

Optical Functions

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Real time spectroscopic ellipsometry determination of the evolution of amorphous semiconductor optical functions, bandgap, and microstructure

Journal of Non-Crystalline Solids ◽

10.1016/s0022-3093(05)80238-8 ◽

1991 ◽

Vol 137-138 ◽

pp. 787-790 ◽

Cited By ~ 4

Author(s):

Y.M. Li ◽

Ilsin An ◽

H.V. Nguyen ◽

C.R. Wronski ◽

R.W. Collins

Keyword(s):

Real Time ◽

Spectroscopic Ellipsometry ◽

Amorphous Semiconductor ◽

Optical Functions

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Real-Time Spectroscopic Ellipsometry Studies of the Nucleation, Growth, and Optical Functions of Thin Films, Part II: Aluminum

Physics of Thin Films - Optical Characterization of Real Surfaces and Films ◽

10.1016/b978-0-12-533019-0.50008-9 ◽

1994 ◽

pp. 127-189 ◽

Cited By ~ 2

Author(s):

HIEN V. NGUYEN ◽

ILSIN AN ◽

ROBERT W. COLLINS

Keyword(s):

Thin Films ◽

Real Time ◽

Spectroscopic Ellipsometry ◽

Optical Functions ◽

Nucleation Growth

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Finite-size effects on the optical functions of silicon microcrystallites: A real-time spectroscopic ellipsometry study

Physical Review B ◽

10.1103/physrevb.47.1911 ◽

1993 ◽

Vol 47 (4) ◽

pp. 1911-1917 ◽

Cited By ~ 35

Author(s):

Hien V. Nguyen ◽

R. W. Collins

Keyword(s):

Real Time ◽

Spectroscopic Ellipsometry ◽

Size Effects ◽

Finite Size ◽

Finite Size Effects ◽

Optical Functions

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Nucleation and growth of MgO atomic layer deposition: A real-time spectroscopic ellipsometry study

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4816776 ◽

2013 ◽

Vol 31 (6) ◽

pp. 06F101 ◽

Cited By ~ 6

Author(s):

Han Wang ◽

Kan Fu

Keyword(s):

Atomic Layer Deposition ◽

Real Time ◽

Spectroscopic Ellipsometry ◽

Atomic Layer ◽

Nucleation And Growth ◽

Layer Deposition

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Nucleation and growth mode of the molecular beam epitaxy of GaN on 4H–SiC exploiting real time spectroscopic ellipsometry

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2005.07.016 ◽

2005 ◽

Vol 284 (1-2) ◽

pp. 156-165 ◽

Cited By ~ 11

Author(s):

Maria Losurdo ◽

Giovanni Bruno ◽

T.H. Kim ◽

Soojeong Choi ◽

April Brown ◽

...

Keyword(s):

Molecular Beam Epitaxy ◽

Real Time ◽

Spectroscopic Ellipsometry ◽

Molecular Beam ◽

Nucleation And Growth ◽

Growth Mode

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Real time spectroscopic ellipsometry studies of the nucleation and growth of p-type microcrystalline silicon films on amorphous silicon using B2H6, B(CH3)3 and BF3 dopant source gases

Journal of Applied Physics ◽

10.1063/1.370323 ◽

1999 ◽

Vol 85 (8) ◽

pp. 4141-4153 ◽

Cited By ~ 31

Author(s):

Joohyun Koh ◽

H. Fujiwara ◽

R. J. Koval ◽

C. R. Wronski ◽

R. W. Collins

Keyword(s):

Amorphous Silicon ◽

Real Time ◽

Spectroscopic Ellipsometry ◽

Nucleation And Growth ◽

Silicon Films ◽

Microcrystalline Silicon ◽

P Type ◽

Dopant Source

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