Evolution of the optical functions of thin-film aluminum: A real-time spectroscopic ellipsometry study

Hien V. Nguyen; Ilsin An; R. W. Collins

doi:10.1103/physrevb.47.3947

Evolution of the optical functions of thin-film aluminum: A real-time spectroscopic ellipsometry study

Physical Review B ◽

10.1103/physrevb.47.3947 ◽

1993 ◽

Vol 47 (7) ◽

pp. 3947-3965 ◽

Cited By ~ 67

Author(s):

Hien V. Nguyen ◽

Ilsin An ◽

R. W. Collins

Keyword(s):

Thin Film ◽

Real Time ◽

Spectroscopic Ellipsometry ◽

Optical Functions

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Evolution of the optical functions of aluminum films during nucleation and growth determined by real-time spectroscopic ellipsometry

Physical Review Letters ◽

10.1103/physrevlett.68.994 ◽

1992 ◽

Vol 68 (7) ◽

pp. 994-997 ◽

Cited By ~ 32

Author(s):

H. V. Nguyen ◽

Ilsin An ◽

R. W. Collins

Keyword(s):

Real Time ◽

Spectroscopic Ellipsometry ◽

Nucleation And Growth ◽

Aluminum Films ◽

Optical Functions

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Applications of real-time and mapping spectroscopic ellipsometry for process development and optimization in hydrogenated silicon thin-film photovoltaics technology

Solar Energy Materials and Solar Cells ◽

10.1016/j.solmat.2014.01.028 ◽

2014 ◽

Vol 129 ◽

pp. 32-56 ◽

Cited By ~ 15

Author(s):

Lila Raj Dahal ◽

Jian Li ◽

Jason A. Stoke ◽

Zhiquan Huang ◽

Ambalanath Shan ◽

...

Keyword(s):

Thin Film ◽

Real Time ◽

Spectroscopic Ellipsometry ◽

Process Development ◽

Silicon Thin Film ◽

Hydrogenated Silicon ◽

Thin Film Photovoltaics

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Real-time spectroscopic ellipsometry for determination of the optical functions of ion-beam-deposited hydrogenated amorphous carbon

Thin Solid Films ◽

10.1016/s0040-6090(05)80046-x ◽

1990 ◽

Vol 193-194 ◽

pp. 361-370 ◽

Cited By ~ 5

Author(s):

Y. Cong ◽

I. An ◽

R.W. Collins ◽

K. Vedam ◽

H.S. Witham ◽

...

Keyword(s):

Real Time ◽

Amorphous Carbon ◽

Spectroscopic Ellipsometry ◽

Ion Beam ◽

Hydrogenated Amorphous Carbon ◽

Optical Functions ◽

Hydrogenated Amorphous

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Optical characterization of a four-medium thin film structure by real time spectroscopic ellipsometry: amorphous carbon on tantalum

Applied Optics ◽

10.1364/ao.30.002692 ◽

1991 ◽

Vol 30 (19) ◽

pp. 2692 ◽

Cited By ~ 39

Author(s):

Yue Cong ◽

IIsin An ◽

K. Vedam ◽

Robert W. Collins

Keyword(s):

Thin Film ◽

Real Time ◽

Amorphous Carbon ◽

Spectroscopic Ellipsometry ◽

Optical Characterization ◽

Film Structure ◽

Thin Film Structure

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Optical functions of chemical vapor deposited thin‐film silicon determined by spectroscopic ellipsometry

Applied Physics Letters ◽

10.1063/1.109067 ◽

1993 ◽

Vol 62 (25) ◽

pp. 3348-3350 ◽

Cited By ~ 218

Author(s):

G. E. Jellison ◽

M. F. Chisholm ◽

S. M. Gorbatkin

Keyword(s):

Thin Film ◽

Spectroscopic Ellipsometry ◽

Chemical Vapor ◽

Optical Functions ◽

Thin Film Silicon ◽

Chemical Vapor Deposited

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Spectroscopic ellipsometry on the millisecond time scale for real‐time investigations of thin‐film and surface phenomena

Review of Scientific Instruments ◽

10.1063/1.1143280 ◽

1992 ◽

Vol 63 (8) ◽

pp. 3842-3848 ◽

Cited By ~ 57

Author(s):

Ilsin An ◽

Y. M. Li ◽

H. V. Nguyen ◽

R. W. Collins

Keyword(s):

Thin Film ◽

Real Time ◽

Spectroscopic Ellipsometry ◽

Time Scale ◽

Surface Phenomena ◽

Millisecond Time Scale

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Analysis of critical points in semiconductor optical functions from in situ and real-time spectroscopic ellipsometry

Thin Solid Films ◽

10.1016/0040-6090(93)90106-y ◽

1993 ◽

Vol 233 (1-2) ◽

pp. 272-275 ◽

Cited By ~ 7

Author(s):

Hien V. Nguyen ◽

R.W. Collins

Keyword(s):

Real Time ◽

Spectroscopic Ellipsometry ◽

Critical Points ◽

Optical Functions

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Real-Time Spectroscopic Ellipsometry Studies of the Nucleation, Growth, and Optical Functions of Thin Films, Part I: Tetrahedrally Bonded Materials

Physics of Thin Films - Optical Characterization of Real Surfaces and Films ◽

10.1016/b978-0-12-533019-0.50007-7 ◽

1994 ◽

pp. 49-125 ◽

Cited By ~ 14

Author(s):

ROBERT W. COLLINS ◽

ILSIN AN ◽

HIEN V. NGUYEN ◽

YOUMING LI ◽

YIWEI LU

Keyword(s):

Thin Films ◽

Real Time ◽

Spectroscopic Ellipsometry ◽

Bonded Materials ◽

Optical Functions ◽

Nucleation Growth ◽

Tetrahedrally Bonded

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Characterization of Wide Bandgap Thin Film Growth Using UV-Extended Real Time Spectroscopic Ellipsometry: Applications to Cubic Boron Nitride

Journal of Wide Bandgap Materials ◽

10.1106/152451102024505 ◽

2002 ◽

Vol 9 (3) ◽

pp. 191-206

Author(s):

J. A. Zapien ◽

R. W. Collins ◽

L. J. Pilione ◽

R. Messier

Keyword(s):

Thin Film ◽

Boron Nitride ◽

Real Time ◽

Spectroscopic Ellipsometry ◽

Film Growth ◽

Cubic Boron Nitride ◽

Wide Bandgap ◽

Thin Film Growth

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Real time spectroscopic ellipsometry determination of the evolution of amorphous semiconductor optical functions, bandgap, and microstructure

Journal of Non-Crystalline Solids ◽

10.1016/s0022-3093(05)80238-8 ◽

1991 ◽

Vol 137-138 ◽

pp. 787-790 ◽

Cited By ~ 4

Author(s):

Y.M. Li ◽

Ilsin An ◽

H.V. Nguyen ◽

C.R. Wronski ◽

R.W. Collins

Keyword(s):

Real Time ◽

Spectroscopic Ellipsometry ◽

Amorphous Semiconductor ◽

Optical Functions

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