Electron distribution function in a low-pressure inductively coupled plasma

V. I. Kolobov; W. N. G. Hitchon

doi:10.1103/physreve.52.972

Electron distribution function in a low-pressure inductively coupled plasma

Physical Review E ◽

10.1103/physreve.52.972 ◽

1995 ◽

Vol 52 (1) ◽

pp. 972-980 ◽

Cited By ~ 53

Author(s):

V. I. Kolobov ◽

W. N. G. Hitchon

Keyword(s):

Distribution Function ◽

Inductively Coupled Plasma ◽

Electron Distribution ◽

Electron Distribution Function ◽

Low Pressure ◽

Inductively Coupled

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Self-Consistent Kinetic Modeling of Electron Distribution Function in a Low-Pressure Inductively Coupled Plasma

Chinese Physics Letters ◽

10.1088/0256-307x/13/6/013 ◽

1996 ◽

Vol 13 (6) ◽

pp. 447-450

Author(s):

Yun Yang ◽

Han-ming Wu

Keyword(s):

Distribution Function ◽

Kinetic Modeling ◽

Inductively Coupled Plasma ◽

Electron Distribution ◽

Electron Distribution Function ◽

Low Pressure ◽

Inductively Coupled ◽

Self Consistent

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Spatial variation of the electron distribution function in a rf inductively coupled plasma: Experimental and theoretical study

Journal of Applied Physics ◽

10.1063/1.357674 ◽

1994 ◽

Vol 76 (4) ◽

pp. 2048-2058 ◽

Cited By ~ 88

Author(s):

U. Kortshagen ◽

I. Pukropski ◽

M. Zethoff

Keyword(s):

Distribution Function ◽

Spatial Variation ◽

Inductively Coupled Plasma ◽

Electron Distribution ◽

Theoretical Study ◽

Electron Distribution Function ◽

Inductively Coupled

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The influence of anisotropy and non-locality of the electron distribution function as well as non-equilibrium ion diffusion on the electrodynamics of DC discharge at low pressure

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/30/3/015 ◽

1997 ◽

Vol 30 (3) ◽

pp. 423-431 ◽

Cited By ~ 17

Author(s):

V A Feoktistov ◽

V V Ivanov ◽

A M Popov ◽

A T Rakhimov ◽

T V Rakhimova ◽

...

Keyword(s):

Distribution Function ◽

Electron Distribution ◽

Electron Distribution Function ◽

Low Pressure ◽

Ion Diffusion ◽

Dc Discharge ◽

Non Locality ◽

Non Equilibrium

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The nonlocal and local property of the electron energy distribution function in a low-pressure inductively coupled plasma

Physics of Plasmas ◽

10.1063/1.1287826 ◽

2000 ◽

Vol 7 (9) ◽

pp. 3826-3828 ◽

Cited By ~ 13

Author(s):

ChinWook Chung ◽

Hong-Young Chang

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Inductively Coupled Plasma ◽

Electron Energy Distribution Function ◽

Local Property ◽

Low Pressure ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Inductively Coupled

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Fast modelling of low-pressure radio-frequency collisional capacitively coupled discharge and investigation of the formation of a non-Maxwellian electron distribution function

Plasma Sources Science and Technology ◽

10.1088/0963-0252/7/3/004 ◽

1998 ◽

Vol 7 (3) ◽

pp. 268-281 ◽

Cited By ~ 25

Author(s):

S V Berezhnoi ◽

I D Kaganovich ◽

L D Tsendin

Keyword(s):

Distribution Function ◽

Radio Frequency ◽

Electron Distribution ◽

Electron Distribution Function ◽

Low Pressure ◽

Capacitively Coupled

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Electron-distribution-function cutoff mechanism in a low-pressure afterglow plasma

Physical Review E ◽

10.1103/physreve.64.016401 ◽

2001 ◽

Vol 64 (1) ◽

Cited By ~ 25

Author(s):

Robert R. Arslanbekov ◽

Anatoly A. Kudryavtsev ◽

Lev D. Tsendin

Keyword(s):

Distribution Function ◽

Electron Distribution ◽

Electron Distribution Function ◽

Low Pressure ◽

Afterglow Plasma

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Influence of second kind collisions on the electron distribution function in the positive column of low pressure nitrogen discharge

Czechoslovak Journal of Physics ◽

10.1007/bf01596550 ◽

1979 ◽

Vol 29 (4) ◽

pp. 407-421 ◽

Cited By ~ 9

Author(s):

K. Rohlena ◽

T. Růžička

Keyword(s):

Distribution Function ◽

Electron Distribution ◽

Positive Column ◽

Electron Distribution Function ◽

Low Pressure ◽

Nitrogen Discharge

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An efficient kinetic approach to the modeling of the electron distribution function in low-pressure high-density plasma tools

25th Anniversary, IEEE Conference Record - Abstracts. 1998 IEEE International Conference on Plasma Science (Cat. No.98CH36221) ◽

10.1109/plasma.1998.677637 ◽

2002 ◽

Author(s):

U. Kortshagen

Keyword(s):

Distribution Function ◽

Electron Distribution ◽

Electron Distribution Function ◽

Low Pressure ◽

High Density ◽

Kinetic Approach ◽

Density Plasma

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Time resolved measurements in the Ne positive column IV. Study of the electron distribution function in low-pressure arc

Czechoslovak Journal of Physics ◽

10.1007/bf01689613 ◽

1972 ◽

Vol 22 (4) ◽

pp. 264-269 ◽

Cited By ~ 1

Author(s):

M. Tichý

Keyword(s):

Distribution Function ◽

Electron Distribution ◽

Positive Column ◽

Electron Distribution Function ◽

Low Pressure ◽

Time Resolved ◽

Time Resolved Measurements

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Modeling of the low temperature electron distribution function in ultra-fast transient situations for semiconductor devices

Journal de Physique IV (Proceedings) ◽

10.1051/jp4:1998316 ◽

1998 ◽

Vol 08 (PR3) ◽

pp. Pr3-67-Pr3-70

Author(s):

M.-C. Cheng

Keyword(s):

Distribution Function ◽

Low Temperature ◽

Electron Distribution ◽

Semiconductor Devices ◽

Electron Distribution Function ◽

Temperature Electron ◽

Fast Transient

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