Spatial variation of the electron distribution function in a rf inductively coupled plasma: Experimental and theoretical study

U. Kortshagen; I. Pukropski; M. Zethoff

doi:10.1063/1.357674

Spatial variation of the electron distribution function in a rf inductively coupled plasma: Experimental and theoretical study

Journal of Applied Physics ◽

10.1063/1.357674 ◽

1994 ◽

Vol 76 (4) ◽

pp. 2048-2058 ◽

Cited By ~ 88

Author(s):

U. Kortshagen ◽

I. Pukropski ◽

M. Zethoff

Keyword(s):

Distribution Function ◽

Spatial Variation ◽

Inductively Coupled Plasma ◽

Electron Distribution ◽

Theoretical Study ◽

Electron Distribution Function ◽

Inductively Coupled

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Electron distribution function in a low-pressure inductively coupled plasma

Physical Review E ◽

10.1103/physreve.52.972 ◽

1995 ◽

Vol 52 (1) ◽

pp. 972-980 ◽

Cited By ~ 53

Author(s):

V. I. Kolobov ◽

W. N. G. Hitchon

Keyword(s):

Distribution Function ◽

Inductively Coupled Plasma ◽

Electron Distribution ◽

Electron Distribution Function ◽

Low Pressure ◽

Inductively Coupled

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Self-Consistent Kinetic Modeling of Electron Distribution Function in a Low-Pressure Inductively Coupled Plasma

Chinese Physics Letters ◽

10.1088/0256-307x/13/6/013 ◽

1996 ◽

Vol 13 (6) ◽

pp. 447-450

Author(s):

Yun Yang ◽

Han-ming Wu

Keyword(s):

Distribution Function ◽

Kinetic Modeling ◽

Inductively Coupled Plasma ◽

Electron Distribution ◽

Electron Distribution Function ◽

Low Pressure ◽

Inductively Coupled ◽

Self Consistent

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Three-dimensional analytical model for the spatial variation of the foreshock electron distribution function: Systematics and comparisons with ISEE observations

Journal of Geophysical Research Atmospheres ◽

10.1029/ja095ia04p04155 ◽

1990 ◽

Vol 95 (A4) ◽

pp. 4155 ◽

Cited By ~ 100

Author(s):

R. J. Fitzenreiter ◽

J. D. Scudder ◽

A. J. Klimas

Keyword(s):

Distribution Function ◽

Spatial Variation ◽

Analytical Model ◽

Electron Distribution ◽

Electron Distribution Function ◽

Three Dimensional

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Modeling of the low temperature electron distribution function in ultra-fast transient situations for semiconductor devices

Journal de Physique IV (Proceedings) ◽

10.1051/jp4:1998316 ◽

1998 ◽

Vol 08 (PR3) ◽

pp. Pr3-67-Pr3-70

Author(s):

M.-C. Cheng

Keyword(s):

Distribution Function ◽

Low Temperature ◽

Electron Distribution ◽

Semiconductor Devices ◽

Electron Distribution Function ◽

Temperature Electron ◽

Fast Transient

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Measurement of electron distribution function in a cesium plasma

Journal of Applied Physics ◽

10.1063/1.1660965 ◽

1972 ◽

Vol 43 (11) ◽

pp. 4570-4573 ◽

Cited By ~ 1

Author(s):

Che Jen Chen ◽

James Wu ◽

Frank Wu

Keyword(s):

Distribution Function ◽

Electron Distribution ◽

Electron Distribution Function ◽

Cesium Plasma

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Reconciliation of a hot-electron distribution function with the lucky electron-exponential model in silicon

IEEE Electron Device Letters ◽

10.1109/55.63000 ◽

1990 ◽

Vol 11 (10) ◽

pp. 472-474 ◽

Cited By ~ 20

Author(s):

N. Goldsman ◽

L. Henrickson ◽

J. Frey

Keyword(s):

Distribution Function ◽

Electron Distribution ◽

Electron Distribution Function ◽

Exponential Model ◽

Hot Electron

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The calculation of the electron distribution function following tunnelling ionization using a Fokker-Planck method

Journal of Physics B Atomic Molecular and Optical Physics ◽

10.1088/0953-4075/34/5/315 ◽

2001 ◽

Vol 34 (5) ◽

pp. 881-908 ◽

Cited By ~ 14

Author(s):

G J Pert

Keyword(s):

Distribution Function ◽

Electron Distribution ◽

Electron Distribution Function ◽

Fokker Planck

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Distortion of bulk-electron distribution function and its effect on core heating in fast ignition plasmas

Journal of Physics Conference Series ◽

10.1088/1742-6596/112/2/022066 ◽

2008 ◽

Vol 112 (2) ◽

pp. 022066 ◽

Cited By ~ 1

Author(s):

H Matsuura ◽

Y Nakao ◽

M Katsube ◽

T Johzaki

Keyword(s):

Distribution Function ◽

Electron Distribution ◽

Electron Distribution Function ◽

Fast Ignition

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Relativistic electron distribution function of a plasma in a near-critical electric field

Physics of Plasmas ◽

10.1063/1.2219428 ◽

2006 ◽

Vol 13 (7) ◽

pp. 072108 ◽

Cited By ~ 11

Author(s):

P. Sandquist ◽

S. E. Sharapov ◽

P. Helander ◽

M. Lisak

Keyword(s):

Distribution Function ◽

Electric Field ◽

Relativistic Electron ◽

Electron Distribution ◽

Electron Distribution Function

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Improved balance equations for modeling non-stationary transport and the electron distribution function in GaAs

Solid-State Electronics ◽

10.1016/0038-1101(92)90057-j ◽

1992 ◽

Vol 35 (2) ◽

pp. 165-180 ◽

Cited By ~ 8

Author(s):

A. Hintz ◽

K. Schünemann

Keyword(s):

Distribution Function ◽

Electron Distribution ◽

Electron Distribution Function ◽

Balance Equations

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