Coupling of space-dependent electron dynamics and vibrational kinetics in radio-frequency discharges in nitrogen

1994 ◽  
Vol 49 (3) ◽  
pp. 2302-2306 ◽  
Author(s):  
S. Longo ◽  
M. Capitelli
Keyword(s):  
Radio Frequency ◽  
Electron Dynamics ◽  
Vibrational Kinetics ◽  
Radio Frequency Discharges

Vibrational kinetics in liquid nitrogen cooled 5% CO-He radio-frequency discharges

1983 ◽  
Vol 47 (2) ◽  
pp. 107-110 ◽  
Author(s):  
S. De Benedictis ◽  
M. Capitelli ◽  
F. Cramarossa ◽  
R. d'Agostino ◽  
C. Gorse ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Liquid Nitrogen ◽  
Vibrational Kinetics ◽  
Radio Frequency Discharges

scholarly journals Electron dynamics in low pressure capacitively coupled radio frequency discharges

2020 ◽  
Vol 127 (18) ◽  
pp. 181101 ◽  
Author(s):  
S. Wilczek ◽  
J. Schulze ◽  
R. P. Brinkmann ◽  
Z. Donkó ◽  
J. Trieschmann ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Low Pressure ◽  
Electron Dynamics ◽  
Capacitively Coupled ◽  
Radio Frequency Discharges

A self-consistent fluid model for radio-frequency discharges in SiH4–H2 compared to experiments

1997 ◽  
Vol 82 (5) ◽  
pp. 2060-2071 ◽  
Author(s):  
G. J. Nienhuis ◽  
W. J. Goedheer ◽  
E. A. G. Hamers ◽  
W. G. J. H. M. van Sark ◽  
J. Bezemer
Keyword(s):  
Radio Frequency ◽  
Fluid Model ◽  
Self Consistent ◽  
Radio Frequency Discharges

Excitation in radio-frequency discharges

1963 ◽  
Vol 19 (8) ◽  
pp. 1309-1317 ◽  
Author(s):  
R. Mavrodineanu ◽  
R.C. Hughes
Keyword(s):  
Radio Frequency ◽  
Radio Frequency Discharges

Modeling of electronegative radio-frequency discharges

1991 ◽  
Vol 19 (2) ◽  
pp. 122-129 ◽  
Author(s):  
M. Meyyappan ◽  
T.R. Govindan
Keyword(s):  
Radio Frequency ◽  
Radio Frequency Discharges
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